Patents by Inventor Madhuri Kalva

Madhuri Kalva has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas Distribution Apparatuses
    Publication number: 20230193463
    Abstract: Gas distribution apparatuses, e.g., showerheads, comprise passages having a first conical bore section, a small bore section, and a second conical bore section. The first conical bore sections comprise a first non-perpendicular wall angle relative to a back surface of a faceplate. The second conical bore sections comprise a second non-perpendicular angle to a front surface of the faceplate. The conical sections including non-perpendicular angles are effective to mitigate and/or eliminate changes in flow parameters through the passages after bead blast processes.
    Type: Application
    Filed: December 14, 2022
    Publication date: June 22, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Shashidhara Patel H B, Madhuri Kalva, Sreenivasa Rao Nunna, Shih Chung Chen, Yongjing Lin, Bin Cao