Patents by Inventor Mahreeyee Mahajani

Mahreeyee Mahajani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool
    Patent number: 8168269
    Abstract: A batch processing chamber includes a chamber housing, a substrate boat for containing a batch of substrates in a process region, and an excitation assembly for exciting species of a processing gas. The excitation assembly is positioned within the chamber housing and may include plasma, UV, or ion assistance.
    Type: Grant
    Filed: September 16, 2010
    Date of Patent: May 1, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Mahreeyee Mahajani, Joseph Yudovsky, Brendon McDougall