Abstract: A method for manufacturing a multilayer film-deposited substrate includes stacking a plurality of lamination units on the substrate while rotating the substrate around a rotational axis perpendicular to a substrate surface. Each of the lamination units has a plurality of layers formed by a dry deposition process. When a plurality of the multilayer film-deposited substrates are manufactured by the dry deposition process, a deposition is performed in a condition satisfying at least one of the following requirements (1) and (2), with estimating a change with time in a deposition rate: [Tdepo-unit/Tr<(m?0.02) or (m+0.02)<Tdepo-unit/Tr] (1), and [(n?0.02)?Ti/Tr?(n+0.02)] (2). m and n are independently any integer. Ti is a time interval between the depositions among each layer of the plurality of layers. Tdepo-unit is a deposition unit time required for depositing the one lamination unit. Tr is a rotation period of the substrate.

Abstract: A method for manufacturing a multilayer film-deposited substrate includes stacking a plurality of lamination units on the substrate while rotating the substrate around a rotational axis perpendicular to a substrate surface. Each of the lamination units has a plurality of layers formed by a dry deposition process. When a plurality of the multilayer film-deposited substrates are manufactured by the dry deposition process, a deposition is performed in a condition satisfying at least one of the following requirements (1) and (2), with estimating a change with time in a deposition rate: [Tdepo-unit/Tr<(m?0.02) or (m+0.02)<Tdepo-unit/Tr] (1), and [(n?0.02)?Ti/Tr?(n+0.02)] (2). m and n are independently any integer. Ti is a time interval between the depositions among each layer of the plurality of layers. Tdepo-unit is a deposition unit time required for depositing the one lamination unit. Tr is a rotation period of the substrate.

Abstract: A transparent body inspecting device includes a light application unit, an image capturing unit, an image capture driving unit, and a defect determining unit. The image capturing unit is moved in the directions in which the image capturing unit is brought close to and away from the upper surface of the transparent body, and the image capturing unit captures a plurality of images of the transparent body during the movement. The images are captured while the position of the depth of field of the image capturing unit is adjusted to more than one spots inside the transparent body. When brightness of pixels in the captured image is nonuniform, the defect determining unit determines that a defect exists within the depth of field at the time of capture of the image.

Abstract: A transparent body inspecting device includes: a light application unit for applying light to a transparent body; an image capturing unit which captures an image of the transparent body and in which a depth of field is smaller than a height of the transparent body; an image capture driving unit for moving the image capturing unit in a direction in which the image capturing unit is brought close to the transparent body and in a direction in which the image capturing unit is brought away from the transparent body; and a defect determining unit for determining existence or nonexistence of a defect in the transparent body based on whether or not brightness of pixels in the image captured by the image capturing unit is nonuniform, wherein: the image capturing unit carries out image capture more than once while moving in the direction in which the image capturing unit is brought close to the transparent body or in the direction in which the image capturing unit is brought away from the transparent body; and when th