Abstract: Diverting equipment for conveying an article on a conveyance path to a branching path formed so as to branch from the conveyance path. In the conveyance path, a branching section to the branching path has a plurality of conveyance rollers disposed in a conveyance direction H of the article in the conveyance path and a direction orthogonal to the conveyance direction H of the article in the conveyance path, the conveyance rollers forming the conveyance surface of the conveyance path and being rotatable around the axes of vertical shafts. Between the adjacent conveyance rollers disposed in the direction orthogonal to the conveyance direction H of the article, a gap is formed along the conveyance direction H of the article. In the gap, a rail capable of supporting the article is extended along the conveyance direction H of the article.

Abstract: An article sorting apparatus includes an article support body, article lateral pushing bodies, a rectilinear-movement guide body, a sliding guide body having a sliding guide surface, and a diverting mechanism. The sliding guide surface is disposed so as to be spaced apart from the diverting mechanism in a main transport direction across a separation region, and the separation region is provided so as to include a contact start region that is a region in the main transport direction where each of the article lateral pushing bodies initially comes into contact with a target article.

Abstract: Diverting equipment that diverts and transports an article on a transporting route to a branching route. The diverting equipment includes: multiple transport rollers that are arranged in a branching section which is on the transporting route and which branches toward the branching route, and that are rotatable about vertical shafts; multiple diverting transport rollers that are arranged at an upstream side end of the branching route and that can rotate about vertical shafts; and a general controller that controls rotation of the transport rollers and of the diverting transport rollers. The transport rollers and the diverting transport rollers divert and transport the article from the transporting route to the branching route by rotating based on a rotational timing that the general controller controls according to a transport speed and an acceleration/deceleration state of the article that is transported toward the branching section.

Abstract: Diverting equipment for conveying an article on a conveyance path to a branching path formed so as to branch from the conveyance path. In the conveyance path, a branching section to the branching path has a plurality of conveyance rollers disposed in a conveyance direction H of the article in the conveyance path and a direction orthogonal to the conveyance direction H of the article in the conveyance path, the conveyance rollers forming the conveyance surface of the conveyance path and being rotatable around the axes of vertical shafts. Between the adjacent conveyance rollers disposed in the direction orthogonal to the conveyance direction H of the article, a gap is formed along the conveyance direction H of the article. In the gap, a rail capable of supporting the article is extended along the conveyance direction H of the article.

Abstract: Diverting equipment that diverts and transports an article on a transporting route to a branching route. The diverting equipment includes: multiple transport rollers that are arranged in a branching section which is on the transporting route and which branches toward the branching route, and that are rotatable about vertical shafts; multiple diverting transport rollers that are arranged at an upstream side end of the branching route and that can rotate about vertical shafts; and a general controller that controls rotation of the transport rollers and of the diverting transport rollers. The transport rollers and the diverting transport rollers divert and transport the article from the transporting route to the branching route by rotating based on a rotational timing that the general controller controls according to a transport speed and an acceleration/deceleration state of the article that is transported toward the branching section.

Abstract: An article sorting apparatus includes an article support body, article lateral pushing bodies, a rectilinear-movement guide body, a sliding guide body having a sliding guide surface, and a diverting mechanism. The sliding guide surface is disposed so as to be spaced apart from the diverting mechanism in a main transport direction across a separation region, and the separation region is provided so as to include a contact start region that is a region in the main transport direction where each of the article lateral pushing bodies initially comes into contact with a target article.

Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.

Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.

Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.

Abstract: A cleaning sheet comprising a cleaning layer and a releasable protective film laminated on the cleaning layer, wherein each of the relative intensities of the fragment ions Of CH3Si+, C3H9Si+, C5H15Si2O+, C5H15Si3O3+, CH3SiO?, CH3SiO2? and Si+ in the cleaning layer, when the protective film is peeled off the cleaning layer, is 0.1 or less according to time-of-flight secondary ion mass spectrometry, relative to C2H3+ in the case of positive ion or O? in the case of negative ion.

Abstract: A cleaning sheet comprising a cleaning layer and a releasable protective film laminated on the cleaning layer, wherein each of the relative intensities of the fragment ions of CH3Si+, C3H9Si+, C5H15Si2O+, C5H15Si3O3+, C7H21Si3O2+, CH3SiO?, CH3SiO2? and Si+ in the cleaning layer, when the protective film is peeled off the cleaning layer, is 0.1 or less according to time-of-flight secondary ion mass spectrometry, relative to C2H3+ in the case of positive ion or O? in the case of negative ion.

Abstract: A method for producing an organic EL device includes the steps of: preparing an adhesive sheet on which a resin substrate is laminated, allowing the resin substrate to adhere onto a hard substrate with the adhesive sheet interposed therebetween, forming an organic EL element on the resin substrate, thereby producing an organic EL device including the resin substrate and the organic EL element, and peeling the organic EL device from the hard substrate. The adhesive sheet includes a first adhesive layer for being bonded to the hard substrate, and a second adhesive layer formed on the first adhesive layer and bonded to the resin substrate. A non-adhesive region is defined at an end portion of the resin substrate, the non-adhesive region not overlapping with the second adhesive layer but overlapping with the first adhesive layer when projected in the thickness direction.

Abstract: A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.

Abstract: Provided is a cleaning unit for removing foreign matter adhering to a probe needle of a probe card for a continuity test, the cleaning unit being capable of effectively removing the foreign matter adhering to the probe needle without abrading the probe needle. A cleaning sheet of the present invention is a cleaning sheet, including a cleaning layer for removing foreign matter adhering to a probe needle of a probe card for a continuity test, in which the cleaning layer has an arithmetic average roughness Ra in conformity with JIS-B-0601 of 100 nm or less.

Abstract: A method for producing an organic EL device includes the steps of: preparing an adhesive sheet on which a resin substrate is laminated, allowing the resin substrate to adhere onto a hard substrate with the adhesive sheet interposed therebetween, forming an organic EL element on the resin substrate, thereby producing an organic EL device including the resin substrate and the organic EL element, and peeling the organic EL device from the hard substrate. The adhesive sheet includes a first adhesive layer for being bonded to the hard substrate, and a second adhesive layer formed on the first adhesive layer and bonded to the resin substrate. A non-adhesive region is defined at an end portion of the resin substrate, the non-adhesive region not overlapping with the second adhesive layer but overlapping with the first adhesive layer when projected in the thickness direction.

Abstract: A method for producing an organic EL device includes the steps of: preparing an adhesive sheet on which a resin substrate is laminated; allowing the resin substrate to adhere onto a hard substrate with the adhesive sheet interposed therebetween; forming an organic EL element on the resin substrate, thereby producing an organic EL device including the resin substrate and the organic EL element; and peeling the organic EL device from the hard substrate. The adhesive sheet includes a first adhesive layer for being bonded to the hard substrate, and a second adhesive layer formed on the first adhesive layer and bonded to the resin substrate. The adhesive strength of the first adhesive layer is different from the adhesive strength of the second adhesive layer.

Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.

Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.

Abstract: A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.

Abstract: A cleaning sheet comprises a cleaning layer provided on one side of a base material, from which cleaning layer F?, Cl?, Br?, NO2?, NO3?, PO43?, SO42?, Na+, NH4+ and K+ are extractable with pure water each in an amount of not greater than 20 ppm, when extracted under boiling at 120° C. for 1 hour, and a pressure-sensitive adhesive layer provided on the other side of the base material, a carrying material with cleaning capacity comprising the aforementioned cleaning sheet laminated on a carrying material with a pressure-sensitive adhesive layer. The present disclosure also relates to a method for cleaning a substrate processing equipment which comprises conveying the aforementioned carrying material with cleaning capacity into the substrate processing equipment.