Abstract: A surface shape detection device using differential interference optics achieves restoration error reduction of a surface shape while maintaining resolution.

Abstract: DC/DC converters arranged side by side have first output terminals conducting to one pole of capacitors for rectification, second output terminals conducting to the other pole of the capacitors, and connection terminals disposed next to the second output terminals. The first output terminals are connected together by an I-shaped bus bar of copper or the like fastened thereto with screws. The second output terminals are connected together by one linear portion of a U-shaped bus bar fastened thereto with screws. The connection terminals are connected together by the other linear portion of the U-shaped bus bar fastened thereto with screws. In this way, the resistances of the bus bars connected to both ends of the capacitors are made substantially equal, and thereby the voltages applied to the capacitors are made equal.

Abstract: DC/DC converters 21, 22, and 23 arranged side by side have first output terminals 21a, 22a, and 23a conducting to one pole of capacitors for rectification, second output terminals 21b, 22b, and 23b conducting to the other pole of the capacitors, and connection terminals 21c, 22c, and 23c disposed next to the second output terminals 21b, 22b, and 23b. The first output terminals 21a, 22a, and 23a are connected together by an I-shaped bus bar 31 of copper or the like fastened thereto with screws. The second output terminals 21b, 22b, and 23b are connected together by one linear portion of a U-shaped bus bar 32 fastened thereto with screws. The connection terminals 21c, 22c, and 23c are connected together by the other linear portion of the U-shaped bus bar 32 fastened thereto with screws. In this way, the resistances of the bus bars 31 and 32 connected to both ends of the capacitors are made substantially equal, and thereby the voltages applied to the capacitors are made equal.