Abstract: This invention provides an attraction holding apparatus for holding a plate-shaped specimen to improve the uniformity of surface temperatures in microscopic regions of the specimen while exhibiting sufficient holding strength and detachability after the impressed voltage is removed (in the case of electrostatic chucking), without causing degradation in the chemical and mechanical properties at the surfaces contacting the specimen, such as the upper surfaces of the protrusions, and without having to introduce excessive amount of gas. This attraction holding apparatus is constituted by a flat base and a plurality of protrusions erected in the attachment region in the flat base, so that the plate-shaped specimen is held on the protrusions. Each upper surf ace of the protrusions is constituted by a specimen holding surface and a concavity.

Abstract: There is provided a susceptor with a built-in electrode and a manufacturing method therefor, in which there is no danger of corrosive gas or plasma or the like penetrating to the inside of the substrate, which has excellent corrosion resistance and plasma resistance, in which nonconductivity under high temperatures is improved, and in which leakage current does not occur.

Abstract: The present invention provides an electrostatic chuck that is able to completely prevent abnormal discharge that not only causes damage and destruction of the electrostatic chuck, but also causes damage of the fixed substrate as well as the generation of particles.

Abstract: This invention provides an attraction holding apparatus for holding a plate-shaped specimen to improve the uniformity of surface temperatures in microscopic regions of the specimen while exhibiting sufficient holding strength and detachability after the impressed voltage is removed (in the case of electrostatic chucking), without causing degradation in the chemical and mechanical properties at the surfaces contacting the specimen, such as the upper surfaces of the protrusions, and without having to introduce excessive amount of gas. This attraction holding apparatus is constituted by a flat base and a plurality of protrusions erected in the attachment region in the flat base, so that the plate-shaped specimen is held on the protrusions. Each upper surface of the protrusions is constituted by a specimen holding surface and a concavity.

Abstract: The plastic film electrostatic adsorption apparatus and electrostatic adsorption method of the present invention disclose a plastic film electrostatic adsorption apparatus comprising an electrostatic adsorption electrode, an insulated dielectric layer that covers the electrostatic adsorption electrode and has a center line average roughness of the adsorption surface on which the plastic film is placed of 0.5 &mgr;m or less, and a power supply electrode that applies a voltage to the electrostatic adsorption electrode. According to this plastic film electrostatic adsorption apparatus and electrostatic adsorption method, surface treatment can be performed even in a vacuum without requiring tedious work such as application or removal of adhesive.