Patents by Inventor Manfred Blattner

Manfred Blattner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Supplying RF power to a plasma process
    Patent number: 7981306
    Abstract: Generating drive signals of at least two RF power generators which supply RF power to a plasma process, in which at least two drive signals, each driving one RF power generator, are generated in an RF generator driver. Each drive signal is generated by a respective function generator, such as a digital sine generator, of the generator driver.
    Type: Grant
    Filed: August 11, 2006
    Date of Patent: July 19, 2011
    Assignee: HUETTINGER Elektronik GmbH + Co. KG
    Inventors: Manfred Blattner, Markus Winterhalter, Ekkehard Mann
  • SUPPLYING RF POWER TO A PLASMA PROCESS
    Publication number: 20070044715
    Abstract: Generating drive signals of at least two RF power generators which supply RF power to a plasma process, in which at least two drive signals, each driving one RF power generator, are generated in an RF generator driver. Each drive signal is generated by a respective function generator, such as a digital sine generator, of the generator driver.
    Type: Application
    Filed: August 11, 2006
    Publication date: March 1, 2007
    Applicant: HUETTINGER Elektronik GmbH + Co. KG
    Inventors: Manfred Blattner, Markus Winterhalter, Ekkehard Mann