Abstract: The invention relates to an exhaust gas heat exchanger comprising a bundle of pipes consisting of exhaust gas pipes and a bypass channel in a common housing. The pipe bundle is arranged in a first chamber that is crossflown by a liquid coolant and the bypass channel is arranged in a second, separate chamber. The pipe bundle and the by pass channel lead into a common exhaust gas inlet area and a common exhaust gas outlet area in which an exhaust gas valve actuated by a servo-drive is arranged, said valve guiding the exhaust gas flow through the pipe bundle or the bypass channel. According to the invention, the exhaust gas valve has a movable closing organ that is resistant to bending, said organ being preferably embodied as a pivoting semi-flap that is fixed with a longitudinal side to a drive shaft that is arranged crosswise relative to the exhaust gas flow.

Abstract: For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation. A transmitting and receiving device (11) consists of a vertical drive mechanism (10) mounted on the wall element (1) and a sensor head (13) that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (10), said sensor head being arranged so as to pivot on the vertical drive mechanism (10) in order to pivot into the opening (4).

Abstract: The invention relates to an exhaust gas heat exchanger comprising a bundle of pipes consisting of exhaust gas pipes and a bypass channel in a common housing. The pipe bundle is arranged in a first chamber that is crossflown by a liquid coolant and the bypass channel is arranged in a second, separate chamber. The pipe bundle and the by pass channel lead into a common exhaust gas inlet area and a common exhaust gas outlet area in which an exhaust gas valve actuated by a servo-drive is arranged, said valve guiding the exhaust gas flow through the pipe bundle or the bypass channel. According to the invention, the exhaust gas valve has a movable closing organ that is resistant to bending, said organ being preferably embodied as a pivoting semi-flap that is fixed with a longitudinal side to a drive shaft that is arranged crosswise relative to the exhaust gas flow.

Abstract: The invention relates to an exhaust gas heat exchanger (2) comprising a bundle of pipes (21) consisting of exhaust gas pipes (22) and a bypass channel (23) in a common housing. The pipe bundle is arranged in a first chamber that is crossflown by a liquid coolant and the bypass channel is arranged in a second, separate chamber. The pipe bundle and the bypass channel lead into a common exhaust gas inlet area and a common exhaust gas outlet area in which an exhaust gas valve actuated by a servo-drive is arranged, said valve guiding the exhaust gas flow through the pipe bundle or the bypass channel. According to the invention, the exhaust gas valve has a movable closing organ that is resistant to bending, said organ being preferably embodied as a pivoting semi-flap (27) that is fixed with a longitudinal side (28) to a drive shaft (30) that is arranged crosswise relative to the exhaust gas flow (A).

Abstract: A device for positioning disk-shaped objects (1) to inspect the front and rear sides of disk-shaped objects and to reduce the negative effect of large-area contact between the holder and the disk-shaped object. The device comprises a rotatable table (24) which can be adjusted in the x-y direction in an adjustment plane and is intended to accomodate a platform (3). A fork-shaped frame (8) is mounted on the platform so as to be rotatable about an axis of rotation which is aligned perpendicular to the surface of the platform (3) and the angle of tilt of which can be set relative to the adjustment plane. At its fork ends, the fork-shaped frame (8) has another axis of rotation which is aligned perpendicular to the axis of rotation of the fork-shaped frame (8) and about which a frame-shaped object holder (9) is mounted so as to be rotatable in the fork-shaped frame (8) for the purpose of turning the object.

Abstract: The invention relates to an exhaust gas heat exchanger (2) comprising a bundle of pipes (21) consisting of exhaust gas pipes (22) and a bypass channel (23) in a common housing. The pipe bundle is arranged in a first chamber that is crossflown by a liquid coolant and the bypass channel is arranged in a second, separate chamber. The pipe bundle and the bypass channel lead into a common exhaust gas inlet area and a common exhaust gas outlet area in which an exhaust gas valve actuated by a servo-drive is arranged, said valve guiding the exhaust gas flow through the pipe bundle or the bypass channel. According to the invention, the exhaust gas valve has a movable closing organ that is resistant to bending, said organ being preferably embodied as a pivoting semi-flap (27) that is fixed with a longitudinal side (28) to a drive shaft (30) that is arranged crosswise relative to the exhaust gas flow (A).

Abstract: For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation.

Abstract: A device for positioning disk-shaped objects (1) to inspect the front and rear sides of disk-shaped objects and to reduce the negative effect of large-area contact between the holder and the disk-shaped object. The device comprises a rotatable table (24) which can be adjusted in the x-y direction in an adjustment plane and is intended to accomodate a platform (3). A fork-shaped frame (8) is mounted on the platform so as to be rotatable about an axis of rotation which is aligned perpendicular to the surface of the platform (3) and the angle of tilt of which can be set relative to the adjustment plane. At its fork ends, the fork-shaped frame (8) has another axis of rotation which is aligned perpendicular to the axis of rotation of the fork-shaped frame (8) and about which a frame-shaped object holder (9) is mounted so as to be rotatable in the fork-shaped frame (8) for the purpose of turning the object.

Abstract: An arrangement for handling wafer-shaped objects is to ensure a high degree of positioning accuracy with increased productivity, freely selectable transport paths, and low mechanical expenditure under SMIF conditions. The arrangement has at least one indexing device for supplying and accepting the objects at a supplying and accepting location situated in a handling plane and at least one transporting device for transporting the wafer-shaped objects between the supplying and accepting location and a work station. The work station, together with at least one other work station, is arranged substantially coaxially to a central point through which passes a rotational axis of a changer. The arrangement is applicable in the manufacture of integrated circuits.