Abstract: A process based on the microwave-induced pyrolysis of an actively seeded, high-purity preceramic polymer for the rapid fabrication of low-cost and net-shape, provides silicon carbide and other ceramic components with specifically tailored compositions and multifunctional properties. The microwave processing method enables the microwave-induced pyrolysis of a polymer precursor that has been seeded with low volume fractions (about 5%) of nanometer-sized metal and/or dielectric fillers. The proper choice of the size of the filler particles, the volume content of the filler and the material type of the filler enables the effective direct coupling of the microwave energy to pyrolyze the preceramic polymer.