Patents by Inventor Marc Van Veenhuizen

Marc Van Veenhuizen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pitch quartering to create pitch halved trenches and pitch halved air gaps
    Patent number: 8907491
    Abstract: A silicon structure is fabricated determining a pattern for wire trenches and air gaps. The wire trenches are created, and certain trenches are used as air gaps. The remaining wire trenches are used for metallization of inter connecting wires.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: December 9, 2014
    Assignee: Intel Corporation
    Inventor: Marc Van Veenhuizen
  • PITCH QUARTERING TO CREATE PITCH HALVED TRENCHES AND PITCH HALVED AIR GAPS
    Publication number: 20140091466
    Abstract: A silicon structure is fabricated determining a pattern for wire trenches and air gaps. The wire trenches are created, and certain trenches are used as air gaps. The remaining wire trenches are used for metallization of inter connecting wires.
    Type: Application
    Filed: September 28, 2012
    Publication date: April 3, 2014
    Inventor: Marc Van Veenhuizen