Patents by Inventor Marcel Eduard Irene Broekaart

Marcel Eduard Irene Broekaart has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming an etch stop layer in a semiconductor device
    Patent number: 6939812
    Abstract: There is a method of manufacturing a semiconductor device. In an example embodiment, the method comprises applying a semiconductor substrate that is provided with a conductor at a surface. The conductor has a top surface portion and sidewall portions, of which at least the top surface portion is provided with an etch stop layer comprising silicon carbide. A dielectric layer is applied. A via is etched in the dielectric layer over the conductor and, and stopping on the etch stop layer to create an exposed part of the etch stop layer. Inside the via from at least the top surface portion of the conductor, the exposed part of the etch stop layer is removed. The via is filled with a conductive material.
    Type: Grant
    Filed: March 12, 2001
    Date of Patent: September 6, 2005
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Marcel Eduard Irene Broekaart, Josephus Franciscus Antonius Maria Guelen, Eric Gerritsen
  • Method of manufacturing a semiconductor device
    Publication number: 20010046784
    Abstract: A method of manufacturing an electronic device, a semiconductor device in particular but not exclusively, which method comprises the steps of:
    Type: Application
    Filed: March 12, 2001
    Publication date: November 29, 2001
    Inventors: Marcel Eduard Irene Broekaart, Josephus Franciscus Antonius Maria Guelen, Eric Gerritsen