Patents by Inventor Marcel Johannes Petrus Theodorus VAN DER HOORN

Marcel Johannes Petrus Theodorus VAN DER HOORN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation filter for a radiation sensor
    Patent number: 11960215
    Abstract: A radiation filter for reducing transmission of an unwanted wavelength of radiation. The radiation filter includes zirconium and SiN3. The radiation filter may form part of a radiation sensor including a passivation layer arranged to receive radiation transmitted by the radiation filter, a photodiode arranged to receive radiation transmitted by the passivation layer, and circuit elements connected to the photodiode. The radiation sensor may perform optical measurements as part of an extreme ultraviolet lithographic apparatus or a lithographic tool.
    Type: Grant
    Filed: September 19, 2019
    Date of Patent: April 16, 2024
    Assignee: ASML NETHERLANDS B. V.
    Inventors: Vahid Mohammadi, Yassin Chowdhury, Pieter Cristiaan De Groot, Wouter Joep Engelen, Marcel Johannes Petrus Theodorus Van Der Hoorn
  • RADIATION FILTER FOR A RADIATION SENSOR
    Publication number: 20210349398
    Abstract: A radiation filter for reducing transmission of an unwanted wavelength of radiation. The radiation filter includes zirconium and SiN3. The radiation filter may form part of a radiation sensor including a passivation layer arranged to receive radiation transmitted by the radiation filter, a photodiode arranged to receive radiation transmitted by the passivation layer, and circuit elements connected to the photodiode. The radiation sensor may perform optical measurements as part of an extreme ultraviolet lithographic apparatus or a lithographic tool.
    Type: Application
    Filed: September 19, 2019
    Publication date: November 11, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Vahid MOHAMMADI, Yassin CHOWDHURY, Pieter Cristiaan DE GROOT, Wouter Joep ENGELEN, Marcel Johannes Petrus Theodorus VAN DER HOORN