Patents by Inventor Marco Del Sarto

Marco Del Sarto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for sealing devices incorporating microstructures
    Publication number: 20030143773
    Abstract: A process for the fabrication of devices that integrate protected microstructures, comprising the following steps: forming, in a body of semiconductor material, at least one microstructure having at least one first portion and one second portion which are relatively mobile with respect to one another and are separated from one another by at least one gap region, which is accessible through a face of the body; and sealing the gap. The sealing step includes depositing on the face of the body a layer of protective material, in such a way as to close the gap region, the protective layer being such as to enable relative motion between the first portion and the second portion of the microstructure.
    Type: Application
    Filed: November 12, 2002
    Publication date: July 31, 2003
    Applicant: STMicroelectronics S.r.I.
    Inventors: Simone Sassolini, Marco Del Sarto, Giovanni Frezza, Lorenzo Baldo