Abstract: A vacuum valve including a valve seat having a valve opening defining an opening axis and a first seal surface circumferential around the valve opening and having a closure element having a second seal surface corresponding to the first seal surface. The first seal surface and/or the second seal surface has an at least two-component material composite having a metallic carrier component and a polymer-based seal material. The metallic carrier component defines an inner and outer carrier region and has a plurality of defined depressions extending in the inner carrier region by the seal surface. The seal material is applied to the carrier component such that a defined profile of the seal material is provided on the outer carrier region and a part of the seal material extends at least into a part of the depressions of the carrier component and fills them at least halfway.

Abstract: In a seal arrangement for sealing first and second components of a vacuum device to one another using an elastomeric sealing material arranged on one of the two components and interacts with a sealing surface arranged on the other component, in a sealed state of the components, the first component is pressed onto the second component by a pressing-on force which acts in a pressing-on direction. The first component has a carrying portion and a bending portion. The elastomeric sealing material is arranged on the bending portion and the sealing surface is arranged on the second component, or vice versa. The thickness of the bending portion, for the case that the elastomeric sealing material is arranged on the bending portion without accounting for the elastomeric sealing material is less than one third of the thickness of the carrying portion and less than one fifth of the length of the bending portion.

Abstract: A vacuum valve including a valve seat having a valve opening defining an opening axis and a first seal surface circumferential around the valve opening and having a closure element having a second seal surface corresponding to the first seal surface. The first seal surface and/or the second seal surface has an at least two-component material composite having a metallic carrier component and a polymer-based seal material. The metallic carrier component defines an inner and outer carrier region and has a plurality of defined depressions extending in the inner carrier region by the seal surface. The seal material is applied to the carrier component such that a defined profile of the seal material is provided on the outer carrier region and a part of the seal material extends at least into a part of the depressions of the carrier component and fills them at least halfway.