Patents by Inventor Marianne Fuierer

Marianne Fuierer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vaporizer delivery ampoule
    Patent number: 6921062
    Abstract: A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances extending into the interior of the each stacked container thereby providing channels for passage of a carrier gas between adjacent vertically stacked containers.
    Type: Grant
    Filed: July 23, 2002
    Date of Patent: July 26, 2005
    Assignee: Advanced Technology Materials, Inc.
    Inventors: John Gregg, Scott Battle, Jeffrey I. Banton, Donn Naito, Marianne Fuierer
  • Vaporizer delivery ampoule
    Publication number: 20040016404
    Abstract: A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances extending into the interior of the each stacked container thereby providing channels for passage of a carrier gas between adjacent vertically stacked containers.
    Type: Application
    Filed: July 23, 2002
    Publication date: January 29, 2004
    Inventors: John Gregg, Scott Battle, Jeffrey I. Banton, Donn Naito, Marianne Fuierer