Patents by Inventor Marie-Claire Cyrilla

Marie-Claire Cyrilla has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20050067374
    Abstract: A method of making a read sensor which defines its stripe height before its trackwidth using photoresist layers formed without undercuts is disclosed. The photoresist layers are removed using chemical-mechanical polishing (CMP) lift-off techniques instead of using conventional solvents. In particular, a first photoresist layer is formed in a central region over a plurality of read sensor layers. End portions of the read sensor layers around the first photoresist layer are removed by ion milling to define the stripe height for the read sensor. Next, insulator layers are deposited where the end portions of the read sensor layers were removed. The first photoresist layer is then removed through mechanical interaction with a CMP pad. In subsequently defining the trackwidth for the read sensor, a second photoresist layer is formed in a central region over the remaining read sensor layers.
    Type: Application
    Filed: September 30, 2003
    Publication date: March 31, 2005
    Inventors: Ananda Baer, Marie-Claire Cyrilla, Frederick Dill, Benjamin Wang, Charngye Hwang, Mustafa Pinarbasi