Patents by Inventor Marinus J. P. Hopstaken

Marinus J. P. Hopstaken has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11700778
    Abstract: A method of controlling the forming voltage of a dielectric film in a resistive random access memory (ReRAM) device. The method includes depositing a dielectric film contains intrinsic defects on a substrate, forming a plasma-excited treatment gas containing H2 gas, and exposing the dielectric film to the plasma-excited treatment gas to create additional defects in the dielectric film without substantially changing a physical thickness of the dielectric film, where the additional defects lower the forming voltage needed for generating an electrically conducting filament across the dielectric film. The dielectric film can include a metal oxide film and the plasma-excited treatment gas may be formed using a microwave plasma source.
    Type: Grant
    Filed: April 9, 2021
    Date of Patent: July 11, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Steven Consiglio, Cory Wajda, Kandabara Tapily, Takaaki Tsunomura, Takashi Ando, Paul C. Jamison, Eduard A. Cartier, Vijay Narayanan, Marinus J. P. Hopstaken
  • Publication number: 20210234096
    Abstract: A method of controlling the forming voltage of a dielectric film in a resistive random access memory (ReRAM) device. The method includes depositing a dielectric film contains intrinsic defects on a substrate, forming a plasma-excited treatment gas containing H2 gas, and exposing the dielectric film to the plasma-excited treatment gas to create additional defects in the dielectric film without substantially changing a physical thickness of the dielectric film, where the additional defects lower the forming voltage needed for generating an electrically conducting filament across the dielectric film. The dielectric film can include a metal oxide film and the plasma-excited treatment gas may be formed using a microwave plasma source.
    Type: Application
    Filed: April 9, 2021
    Publication date: July 29, 2021
    Inventors: Steven Consiglio, Cory Wajda, Kandabara Tapily, Takaaki Tsunomura, Takashi Ando, Paul C. Jamison, Eduard A. Cartier, Vijay Narayanan, Marinus J.P. Hopstaken
  • Patent number: 10991881
    Abstract: A method of controlling the forming voltage of a dielectric film in a resistive random access memory (ReRAM) device. The method includes depositing a dielectric film contains intrinsic defects on a substrate, forming a plasma-excited treatment gas containing H2 gas, and exposing the dielectric film to the plasma-excited treatment gas to create additional defects in the dielectric film without substantially changing a physical thickness of the dielectric film, where the additional defects lower the forming voltage needed for generating an electrically conducting filament across the dielectric film. The dielectric film can include a metal oxide film and the plasma-excited treatment gas may be formed using a microwave plasma source.
    Type: Grant
    Filed: May 31, 2019
    Date of Patent: April 27, 2021
    Assignee: Tokyo Electron Limited
    Inventors: Steven Consiglio, Cory Wajda, Kandabara Tapily, Takaaki Tsunomura, Takashi Ando, Paul C. Jamison, Eduard A. Cartier, Vijay Narayanan, Marinus J. P. Hopstaken
  • Patent number: 10978604
    Abstract: A method for fabricating a photovoltaic device includes forming a polycrystalline absorber layer including Cu—Zn—Sn—S(Se) (CZTSSe) over a substrate. The absorber layer is rapid thermal annealed in a sealed chamber having elemental sulfur within the chamber. A sulfur content profile is graded in the absorber layer in accordance with a size of the elemental sulfur and an anneal temperature to provide a graduated bandgap profile for the absorber layer. Additional layers are formed on the absorber layer to complete the photovoltaic device.
    Type: Grant
    Filed: May 11, 2017
    Date of Patent: April 13, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Talia S. Gershon, Marinus J. P. Hopstaken, Jeehwan Kim, Yun Seog Lee
  • Publication number: 20200381624
    Abstract: A method of controlling the forming voltage of a dielectric film in a resistive random access memory (ReRAM) device. The method includes depositing a dielectric film contains intrinsic defects on a substrate, forming a plasma-excited treatment gas containing H2 gas, and exposing the dielectric film to the plasma-excited treatment gas to create additional defects in the dielectric film without substantially changing a physical thickness of the dielectric film, where the additional defects lower the forming voltage needed for generating an electrically conducting filament across the dielectric film. The dielectric film can include a metal oxide film and the plasma-excited treatment gas may be formed using a microwave plasma source.
    Type: Application
    Filed: May 31, 2019
    Publication date: December 3, 2020
    Inventors: Steven Consiglio, Cory Wajda, Kandabara Tapily, Takaaki Tsunomura, Takashi Ando, Paul C. Jamison, Eduard A. Cartier, Vijay Narayanan, Marinus J.P. Hopstaken
  • Patent number: 10833311
    Abstract: An anode structure for rechargeable lithium-ion batteries that have a high-capacity are provided. The anode structure, which is made utilizing an anodic etching process, is of unitary construction and includes a non-porous region and a porous region including a top porous layer (Porous Region 1) having a first thickness and a first porosity, and a bottom porous layer (Porous Region 2) located beneath the top porous layer and forming an interface with the non-porous region. At least an upper portion of the non-porous region and the entirety of the porous region are composed of silicon, and the bottom porous layer has a second thickness that is greater than the first thickness, and a second porosity that is greater than the first porosity.
    Type: Grant
    Filed: July 3, 2018
    Date of Patent: November 10, 2020
    Assignee: International Business Machines Corporation
    Inventors: Joel P. de Souza, John Collins, Devendra K. Sadana, John A. Ott, Marinus J. P. Hopstaken, Stephen W. Bedell
  • Publication number: 20200014018
    Abstract: An anode structure for rechargeable lithium-ion batteries that have a high-capacity are provided. The anode structure, which is made utilizing an anodic etching process, is of unitary construction and includes a non-porous region and a porous region including a top porous layer (Porous Region 1) having a first thickness and a first porosity, and a bottom porous layer (Porous Region 2) located beneath the top porous layer and forming an interface with the non-porous region. At least an upper portion of the non-porous region and the entirety of the porous region are composed of silicon, and the bottom porous layer has a second thickness that is greater than the first thickness, and a second porosity that is greater than the first porosity.
    Type: Application
    Filed: July 3, 2018
    Publication date: January 9, 2020
    Inventors: Joel P. de Souza, John Collins, Devendra K. Sadana, John A. Ott, Marinus J. P. Hopstaken, Stephen W. Bedell
  • Patent number: 10529832
    Abstract: Embodiments are directed to a method of forming a semiconductor device and resulting structures having a shallow, abrupt and highly activated tin (Sn) extension implant junction. The method includes forming a semiconductor fin on a substrate. A gate is formed over a channel region of the semiconductor fin. A Sn extension implant junction is formed on a surface of the semiconductor fin in the channel region.
    Type: Grant
    Filed: December 19, 2016
    Date of Patent: January 7, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: John Bruley, Marinus J. P. Hopstaken, Kam-Leung Lee
  • Publication number: 20180175174
    Abstract: Embodiments are directed to a method of forming a semiconductor device and resulting structures having a shallow, abrupt and highly activated tin (Sn) extension implant junction. The method includes forming a semiconductor fin on a substrate. A gate is formed over a channel region of the semiconductor fin. A Sn extension implant junction is formed on a surface of the semiconductor fin in the channel region.
    Type: Application
    Filed: December 19, 2016
    Publication date: June 21, 2018
    Inventors: John Bruley, Marinus J.P. Hopstaken, Kam-Leung Lee
  • Publication number: 20170250302
    Abstract: A method for fabricating a photovoltaic device includes forming a polycrystalline absorber layer including Cu—Zn—Sn—S(Se) (CZTSSe) over a substrate. The absorber layer is rapid thermal annealed in a sealed chamber having elemental sulfur within the chamber. A sulfur content profile is graded in the absorber layer in accordance with a size of the elemental sulfur and an anneal temperature to provide a graduated bandgap profile for the absorber layer. Additional layers are formed on the absorber layer to complete the photovoltaic device.
    Type: Application
    Filed: May 11, 2017
    Publication date: August 31, 2017
    Inventors: Talia S. Gershon, Marinus J.P. Hopstaken, Jeehwan Kim, Yun Seog Lee
  • Patent number: 9722120
    Abstract: A method for fabricating a photovoltaic device includes forming a polycrystalline absorber layer including Cu—Zn—Sn—S(Se) (CZTSSe) over a substrate. The absorber layer is rapid thermal annealed in a sealed chamber having elemental sulfur within the chamber. A sulfur content profile is graded in the absorber layer in accordance with a size of the elemental sulfur and an anneal temperature to provide a graduated bandgap profile for the absorber layer. Additional layers are formed on the absorber layer to complete the photovoltaic device.
    Type: Grant
    Filed: September 14, 2015
    Date of Patent: August 1, 2017
    Assignee: International Business Machines Corporation
    Inventors: Talia S. Gershon, Marinus J. P. Hopstaken, Jeehwan Kim, Yun Seog Lee
  • Patent number: 9679775
    Abstract: An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on an exposed surface of a semiconductor layer and depositing a dopant material on the exposed surface of the semiconductor layer. Furthermore, the approach includes alloying a metal layer with a dopant layer to form a semiconductor device junction where the semiconductor layer is composed of a Group III-V semiconductor material, the surface modification treatment occurs in a vacuum chamber to remove surface oxides from the exposed surface of the semiconductor layer, and each of the above processes occur at a low temperature.
    Type: Grant
    Filed: July 15, 2016
    Date of Patent: June 13, 2017
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Marinus J. P. Hopstaken, Young-Hee Kim, Masaharu Kobayashi, Effendi Leobandung, Deborah A. Neumayer, Dae-Gyu Park, Uzma Rana, Tsong-Lin Tai
  • Publication number: 20170077337
    Abstract: A method for fabricating a photovoltaic device includes forming a polycrystalline absorber layer including Cu—Zn—Sn—S(Se) (CZTSSe) over a substrate. The absorber layer is rapid thermal annealed in a sealed chamber having elemental sulfur within the chamber. A sulfur content profile is graded in the absorber layer in accordance with a size of the elemental sulfur and an anneal temperature to provide a graduated bandgap profile for the absorber layer. Additional layers are formed on the absorber layer to complete the photovoltaic device.
    Type: Application
    Filed: September 14, 2015
    Publication date: March 16, 2017
    Inventors: Talia S. Gershon, Marinus J.P. Hopstaken, Jeehwan Kim, Yun Seog Lee
  • Publication number: 20160329211
    Abstract: An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on an exposed surface of a semiconductor layer and depositing a dopant material on the exposed surface of the semiconductor layer. Furthermore, the approach includes alloying a metal layer with a dopant layer to form a semiconductor device junction where the semiconductor layer is composed of a Group III-V semiconductor material, the surface modification treatment occurs in a vacuum chamber to remove surface oxides from the exposed surface of the semiconductor layer, and each of the above processes occur at a low temperature.
    Type: Application
    Filed: July 15, 2016
    Publication date: November 10, 2016
    Inventors: Kevin K. Chan, Marinus J.P. Hopstaken, Young-Hee Kim, Masaharu Kobayashi, Effendi Leobandung, Deborah A. Neumayer, Dae-Gyu Park, Uzma Rana, Tsong-Lin Tai
  • Publication number: 20160254150
    Abstract: An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on an exposed surface of a semiconductor layer and depositing a dopant material on the exposed surface of the semiconductor layer. Additionally, the approach includes performing a low temperature anneal in an oxygen free environment followed by depositing a metal layer on the dopant layer. Furthermore, the approach includes alloying the metal layer with the dopant layer to form a semiconductor device junction where the semiconductor layer is composed of a Group III-V semiconductor material, the surface modification treatment occurs in a vacuum chamber to remove surface oxides from the exposed surface of the semiconductor layer, and each of the above processes occur at a low temperature.
    Type: Application
    Filed: February 27, 2015
    Publication date: September 1, 2016
    Inventors: Kevin K. Chan, Marinus J.P. Hopstaken, Young-Hee Kim, Masaharu Kobayashi, Effendi Leobandung, Deborah A. Neumayer, Dae-Gyu Park, Uzma Rana, Tsong-Lin Tai
  • Patent number: 9418846
    Abstract: An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on an exposed surface of a semiconductor layer and depositing a dopant material on the exposed surface of the semiconductor layer. Additionally, the approach includes performing a low temperature anneal in an oxygen free environment followed by depositing a metal layer on the dopant layer. Furthermore, the approach includes alloying the metal layer with the dopant layer to form a semiconductor device junction where the semiconductor layer is composed of a Group III-V semiconductor material, the surface modification treatment occurs in a vacuum chamber to remove surface oxides from the exposed surface of the semiconductor layer, and each of the above processes occur at a low temperature.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: August 16, 2016
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Marinus J. P. Hopstaken, Young-Hee Kim, Masaharu Kobayashi, Effendi Leobandung, Deborah A. Neumayer, Dae-Gyu Park, Uzma Rana, Tsong-Lin Tai