Abstract: A displacement transducer comprises a rigid support, a flexible diaphragm having a periphery attached to the support, and an interior free to deflect, and a strain sensor on the diaphragm. The diaphragm has a circular periphery and a plurality of concentric annular corrugations coaxial with the periphery. A first pair of strain gauges sense the tangential strain on one of the crests of the corrugations and a second pair of strain gauges sense the tangential strain in one of the troughs of the corrugations. The strain gauges are connected in an electrical bridge to provide a displacement representative output.

Abstract: A differential pressure transducer assembly which indicates pressure differences while remaining insensitive to variations in line pressure and overload pressure. The assembly has a transducer consisting of a semi-conductor sensor isolated from the medium being measured by mounting it on a resilient diaphragm between two small hydraulic chambers. The chambers are closed with a pair of diaphragms which isolate the two chambers from the external environment. The transducer sensor is comprised of a silicon chip having a large center boss area which is supported by a silicon back plate of similar material fused to the silicon chip at the periphery. The back plate is mounted by a hollow support stud to a threaded hub at the center of the resilient diaphragm separating the chambers. A space between the silicon chip and back plate communicates with the hydraulic fluid of one chamber through an inlet in the support stud. The opposite side of the silicon chip is immersed in the hydraulic fluid of the other chamber.