Abstract: A stackable power storage system is herein described. It comprises a plurality of power modules connectable to each other into a power stack, each one of the power modules comprising at least of a bottom and a top identical to another one of the power modules. The bottom of a top one of the power modules is at least partially nestable in a bottom one of the power modules, The modules comprise connectors connected connectable between power modules when the power modules are stacked thereby at least partially nested relative to each other. Power is transferred between the power modules through the connectors.

Abstract: The present invention provides new and improved methods and apparatus for removing contamination from surfaces of substrates. Existing techniques include plasma ashing, glow discharge or UV/ozone processes. The present invention includes cleaning the substrate surfaces by transporting the substrates to be cleaned through a first zone where the substrates are heated preferably in a nitrogen atmosphere and then to a second zone where the substrates are surrounded by an atmosphere of ozone. The organic contamination is thereby vaporized into vapor products including CO, CO2 and H2O.