Patents by Inventor Mario S. Manriquez

Mario S. Manriquez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas seal and support for rotating semiconductor processor
    Patent number: 6125551
    Abstract: A rotating wafer processor uses a non-contacting gas seal mounted to a process chamber and a vibration isolation mount between the chamber and a support structure. The non-contacting seal incorporates a housing with a chamfer on opposing ends of an annular land encircling a rotating drive shaft, and one or more outlet ports on the chamfers to form a gas-purged, noncontacting seal. The seal is directly mounted to the chamber and interposed between the chamber and bearings that support the drive shaft, so the shaft, chamber and rotating load vibrate together.
    Type: Grant
    Filed: March 17, 1998
    Date of Patent: October 3, 2000
    Assignee: Verteq, Inc.
    Inventors: James R. C. Bushong, Mario S. Manriquez