Patents by Inventor Mark A. Gouker
Mark A. Gouker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10658424Abstract: A superconducting integrated circuit includes at least one superconducting resonator, including a substrate, a conductive layer disposed over a surface of the substrate with the conductive layer including at least one conductive material including a substantially low stress polycrystalline Titanium Nitride (TiN) material having an internal stress less than about two hundred fifty MPa (magnitude) such that the at least one superconducting resonator and/or qubit (hereafter called “device”) is provided as a substantially high quality factor, low loss superconducting device.Type: GrantFiled: July 21, 2016Date of Patent: May 19, 2020Assignee: MASSACHUSETTS INSTITUTE OF TECHNOLOGYInventors: William D. Oliver, Rabindra N. Das, David J. Hover, Danna Rosenberg, Xhovalin Miloshi, Vladimir Bolkhovsky, Jonilyn L. Yoder, Corey W. Stull, Mark A. Gouker
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Patent number: 10418350Abstract: A multi-layer semiconductor device includes at least a first semiconductor structure and a second semiconductor structure, each having first and second opposing surfaces. The second semiconductor structure includes a first section and a second section, the second section including a device layer and an insulating layer. The second semiconductor structure also includes one or more conductive structures and one or more interconnect pads. Select ones of the interconnect pads are electrically coupled to select ones of the conductive structures. The multi-layer semiconductor device additionally includes one or more interconnect structures disposed between and coupled to select portions of second surfaces of each of the first and second semiconductor structures. A corresponding method for fabricating a multi-layer semiconductor device is also provided.Type: GrantFiled: August 11, 2015Date of Patent: September 17, 2019Assignee: Massachusetts Institute of TechnologyInventors: Rabindra N. Das, Donna-Ruth W. Yost, Chenson Chen, Keith Warner, Steven A. Vitale, Mark A. Gouker, Craig L. Keast
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Patent number: 10396269Abstract: A multi-layer semiconductor structure includes a first semiconductor structure and a second semiconductor structure, with at least one of the first and second semiconductor structures provided as a superconducting semiconductor structure. The multi-layer semiconductor structure also includes one or more interconnect structures. Each of the interconnect structures is disposed between the first and second semiconductor structures and coupled to respective ones of interconnect pads provided on the first and second semiconductor structures. Additionally, each of the interconnect structures includes a plurality of interconnect sections. At least one of the interconnect sections includes at least one superconducting and/or a partially superconducting material.Type: GrantFiled: November 3, 2016Date of Patent: August 27, 2019Assignee: Massachusetts Institute of TechnologyInventors: William D. Oliver, Andrew J. Kerman, Rabindra N. Das, Donna-Ruth W. Yost, Danna Rosenberg, Mark A. Gouker
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Patent number: 10199553Abstract: Described are concepts, systems, circuits and techniques related to shielded through via structures and methods for fabricating such shielded through via structures. The described shielded through via structures and techniques allow for assembly of multi-layer semiconductor structures including one or more superconducting semiconductor structures (or integrated circuits).Type: GrantFiled: November 3, 2016Date of Patent: February 5, 2019Assignee: Massachusetts Institute of TechnologyInventors: William D. Oliver, Andrew J. Kerman, Rabindra N. Das, Donna-Ruth W. Yost, Danna Rosenberg, Mark A. Gouker
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Patent number: 10134972Abstract: A cryogenic quantum bit package with multiple qubit circuits facilitates inter-qubit signal propagation using a multi-chip module (MCM). Multiple qubits are grouped within the package into one or more qubit integrated circuits (ICs). The qubit ICs themselves are electrically coupled to each other via a structure including a superconducting MCM and superconducting interconnects. Coupling of quantum electrical signals between a qubit and other qubits, a substrate, or the MCM uses a coupler circuit, such as a Josephson junction, capacitor, inductor, or resonator.Type: GrantFiled: November 3, 2016Date of Patent: November 20, 2018Assignee: Massachusetts Institute of TechnologyInventors: William D. Oliver, Andrew J. Kerman, Rabindra N. Das, Donna-Ruth W. Yost, Danna Rosenberg, Mark A. Gouker
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Patent number: 10121754Abstract: A method of fabricating an interconnect structure includes providing a semiconductor structure and performing a first spin resist and bake cycle. The first spin resist and bake cycle includes applying a first predetermined amount of a resist material over one or more portions of the semiconductor structure and baking the semiconductor structure to form a first resist layer portion of a resist layer. The method also includes performing a next spin resist and bake cycle. The next spin resist and bake cycle includes applying a next predetermined amount of the resist material and baking the semiconductor structure to form a next resist layer portion of the resist layer. The method additionally includes depositing a conductive material in an opening formed in the resist layer and forming a conductive structure from the conductive material. An interconnect structure is also provided.Type: GrantFiled: November 3, 2016Date of Patent: November 6, 2018Assignee: Massachusetts Institute of TechnologyInventors: William D. Oliver, Andrew J. Kerman, Rabindra N. Das, Donna-Ruth W. Yost, Danna Rosenberg, Mark A. Gouker
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Patent number: 10079224Abstract: A semiconductor structure includes at least two substrate layers, each of the at least two substrate layers having first and second opposing surfaces and a plurality of electrical connections extending between the first and second surfaces. The semiconductor structure also includes a substrate joining layer disposed between and coupled to the second surface of a first one of the at least two substrate layers and the first surface of a second one of the at least two substrate layers. The substrate joining layer includes at least one integrated circuit (IC) structure disposed between the first and second surfaces of said substrate joining layer. A corresponding method for fabricating a semiconductor structure is also provided.Type: GrantFiled: August 11, 2015Date of Patent: September 18, 2018Assignee: Massachusetts Institute of TechnologyInventors: Rabindra N. Das, Donna-Ruth W. Yost, Chenson Chen, Keith Warner, Steven A. Vitale, Mark A. Gouker, Craig L. Keast
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Publication number: 20180247974Abstract: A superconducting integrated circuit includes at least one superconducting resonator, including a substrate, a conductive layer disposed over a surface of the substrate with the conductive layer including at least one conductive material including a substantially low stress polycrystalline Titanium Nitride (TiN) material having an internal stress less than about two hundred fifty MPa (magnitude) such that the at least one superconducting resonator and/or qubit (hereafter called “device”) is provided as a substantially high quality factor, low loss superconducting device.Type: ApplicationFiled: July 21, 2016Publication date: August 30, 2018Inventors: William D. Oliver, Rabindra N. Das, David J. Hover, Danna Rosenberg, Xhovalin Miloshi, Vladimir Bolkhovsky, Jonilyn L. Yoder, Corey W. Stull, Mark A. Gouker
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Patent number: 9881904Abstract: A multi-layer semiconductor device includes two or more semiconductor sections, each of the semiconductor sections including at least at least one device layer having first and second opposing surfaces and a plurality of electrical connections extending between the first and second surfaces. The electrical connections correspond to first conductive structures. The multi-layer semiconductor device also includes one or more second conductive structures which are provided as through oxide via (TOV) or through insulator via (TIV) structures. The multi-layer semiconductor device additionally includes one or more silicon layers. At least a first one of the silicon layers includes at least one third conductive structure which is provided as a through silicon via (TSV) structure. The multi-layer semiconductor device further includes one or more via joining layers including at least one fourth conductive structure. A corresponding method for fabricating a multi-layer semiconductor device is also provided.Type: GrantFiled: November 5, 2015Date of Patent: January 30, 2018Assignee: Massachusetts Institute of TechnologyInventors: Rabindra N. Das, Mark A. Gouker, Pascale Gouker, Leonard M. Johnson, Ryan C. Johnson
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Publication number: 20180012932Abstract: A multi-layer semiconductor structure includes a first semiconductor structure and a second semiconductor structure, with at least one of the first and second semiconductor structures provided as a superconducting semiconductor structure. The multi-layer semiconductor structure also includes one or more interconnect structures. Each of the interconnect structures is disposed between the first and second semiconductor structures and coupled to respective ones of interconnect pads provided on the first and second semiconductor structures. Additionally, each of the interconnect structures includes a plurality of interconnect sections. At least one of the interconnect sections includes at least one superconducting and/or a partially superconducting material.Type: ApplicationFiled: November 3, 2016Publication date: January 11, 2018Inventors: William D. Oliver, Andrew J. Kerman, Rabindra N. Das, Donna-Ruth W. Yost, Danna Rosenberg, Mark A. Gouker
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Publication number: 20180013052Abstract: Quantum bit (qubit) circuits, coupler circuit structures and coupling techniques are described. Such circuits and techniques may be used to provide multi-qubit circuits suitable for use in multichip modules (MCMs).Type: ApplicationFiled: November 3, 2016Publication date: January 11, 2018Inventors: William D. Oliver, Andrew J. Kerman, Rabindra N. Das, Donna-Ruth W. Yost, Danna Rosenberg, Mark A. Gouker
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Patent number: 9812429Abstract: A multi-layer semiconductor device includes a first semiconductor structure having first and second opposing surfaces, the second surface of the first semiconductor structure having at least a first semiconductor package pitch. The multi-layer semiconductor device also includes a second semiconductor structure having first and second opposing surfaces, the first surface of the second semiconductor structure having a second semiconductor package pitch. The multi-layer semiconductor device additionally includes a third semiconductor structure having first and second opposing surfaces, the first surface of the third semiconductor structure having a third semiconductor package pitch which is different from at least the second semiconductor package pitch. The second and third semiconductor structures are provided on a same package level of the multi-layer semiconductor device. A corresponding method for fabricating a multi-layer semiconductor device is also provided.Type: GrantFiled: November 5, 2015Date of Patent: November 7, 2017Assignee: MASSACHUSETTS INSTITUTE OF TECHNOLOGYInventors: Rabindra N. Das, Mark A. Gouker, Pascale Gouker, Leonard M. Johnson, Ryan C. Johnson
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Patent number: 9786633Abstract: A semiconductor structure includes a substrate having first and second opposing surfaces and a plurality of electrical connections extending between the first and second surfaces. The semiconductor structure also includes one or more interconnect pads having first and second opposing surfaces and one or more sides. The first surface of each one of the interconnect pads is disposed over or beneath select portions of at least the second surface of the substrate and is electrically coupled to select ones of the plurality of electrical connections. The semiconductor structure additionally includes an isolating layer having first and second opposing surfaces and openings formed in select portions of the isolating layer extending between the second surface of the isolating layer and the second surfaces of the interconnect pads. A corresponding method for fabricating a semiconductor structure is also provided.Type: GrantFiled: April 23, 2015Date of Patent: October 10, 2017Assignee: Massachusetts Institute of TechnologyInventors: Rabindra N. Das, Peter G. Murphy, Karen E. Magoon, Noyan Kinayman, Michael J. Barbieri, Timothy M. Hancock, Mark A. Gouker
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Patent number: 9780075Abstract: A multi-layer semiconductor device includes at least two semiconductor structures, each of the at least two semiconductor structures having first and second opposing surfaces and including a first section and a second section. The second section includes a device layer and an insulating layer. The multi-layer semiconductor device also includes one or more conductive structures and one or more interconnect pads. Select ones of the one or more interconnect pads are electrically coupled to the one or more conductive structures. The multi-layer semiconductor device additionally includes a via joining layer disposed between and coupled to second surfaces of each of the at least two semiconductor structures. A corresponding method for fabricating a multi-layer semiconductor device is also provided.Type: GrantFiled: August 11, 2015Date of Patent: October 3, 2017Assignee: Massachusetts Institute of TechnologyInventors: Rabindra N. Das, Donna-Ruth W. Yost, Chenson Chen, Keith Warner, Steven A. Vitale, Mark A. Gouker, Craig L. Keast
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Publication number: 20170200700Abstract: A multi-layer semiconductor device includes at least two semiconductor structures, each of the at least two semiconductor structures having first and second opposing surfaces and including a first section and a second section. The second section includes a device layer and an insulating layer. The multi-layer semiconductor device also includes one or more conductive structures and one or more interconnect pads. Select ones of the one or more interconnect pads are electrically coupled to the one or more conductive structures. The multi-layer semiconductor device additionally includes a via joining layer disposed between and coupled to second surfaces of each of the at least two semiconductor structures. A corresponding method for fabricating a multi-layer semiconductor device is also provided.Type: ApplicationFiled: August 11, 2015Publication date: July 13, 2017Applicant: Massachusetts Institute of TechnologyInventors: Rabindra N. Das, Donna-Ruth W. Yost, Chenson Chen, Keith Warner, Steven A. Vitale, Mark A. Gouker, Craig L. Keast
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Publication number: 20170162550Abstract: A semiconductor structure includes at least two substrate layers, each of the at least two substrate layers having first and second opposing surfaces and a plurality of electrical connections extending between the first and second surfaces. The semiconductor structure also includes a substrate joining layer disposed between and coupled to the second surface of a first one of the at least two substrate layers and the first surface of a second one of the at least two substrate layers. The substrate joining layer includes at least one integrated circuit (IC) structure disposed between the first and second surfaces of said substrate joining layer. A corres ponding method for fabricating a semiconductor structure is also provided.Type: ApplicationFiled: August 11, 2015Publication date: June 8, 2017Inventors: Rabindra N. Das, Donna-Ruth W. Yost, Chenson Chen, Keith Warner, Steven A. Vitale, Mark A. Gouker, Craig L. Keast
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Publication number: 20170162507Abstract: A multi-layer semiconductor device includes at least a first semiconductor structure and a second semiconductor structure, each having first and second opposing surfaces. The second semiconductor structure includes a first section and a second section, the second section including a device layer and an insulating layer. The second semiconductor structure also includes one or more conductive structures and one or more interconnect pads. Select ones of the interconnect pads are electrically coupled to select ones of the conductive structures. The multi-layer semiconductor device additionally includes one or more interconnect structures disposed between and coupled to select portions of second surfaces of each of the first and second semiconductor structures. A corresponding method for fabricating a multi-layer semiconductor device is also provided.Type: ApplicationFiled: August 11, 2015Publication date: June 8, 2017Inventors: Rabindra N. Das, Donna-Ruth W. Yost, Chenson Chen, Keith Warner, Steven A. Vitale, Mark A. Gouker, Craig L. Keast
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Publication number: 20170133336Abstract: A method of fabricating an interconnect structure includes providing a semiconductor structure and performing a first spin resist and bake cycle. The first spin resist and bake cycle includes applying a first predetermined amount of a resist material over one or more portions of the semiconductor structure and baking the semiconductor structure to form a first resist layer portion of a resist layer. The method also includes performing a next spin resist and bake cycle. The next spin resist and bake cycle includes applying a next predetermined amount of the resist material and baking the semiconductor structure to form a next resist layer portion of the resist layer. The method additionally includes depositing a conductive material in an opening formed in the resist layer and forming a conductive structure from the conductive material. An interconnect structure is also provided.Type: ApplicationFiled: November 3, 2016Publication date: May 11, 2017Inventors: William D. Oliver, Andrew J. Kerman, Rabindra N. Das, Donna-Ruth W. Yost, Danna Rosenberg, Mark A. Gouker
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Publication number: 20170098627Abstract: A semiconductor structure includes a substrate having first and second opposing surfaces and a plurality of electrical connections extending between the first and second surfaces. The semiconductor structure also includes one or more interconnect pads having first and second opposing surfaces and one or more sides. The first surface of each one of the interconnect pads is disposed over or beneath select portions of at least the second surface of the substrate and is electrically coupled to select ones of the plurality of electrical connections. The semiconductor structure additionally includes an isolating layer having first and second opposing surfaces and openings formed in select portions of the isolating layer extending between the second surface of the isolating layer and the second surfaces of the interconnect pads. A corresponding method for fabricating a semiconductor structure is also provided.Type: ApplicationFiled: April 23, 2015Publication date: April 6, 2017Inventors: Rabindra N. Das, Peter G. Murphy, Karen E. Magoon, Noyan Kinayman, Michael J. Barbieri, Timothy M. Hancock, Mark A. Gouker
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Publication number: 20170092621Abstract: A multi-layer semiconductor device includes a first semiconductor structure having first and second opposing surfaces, the second surface of the first semiconductor structure having at least a first semiconductor package pitch. The multi-layer semiconductor device also includes a second semiconductor structure having first and second opposing surfaces, the first surface of the second semiconductor structure having a second semiconductor package pitch. The multi-layer semiconductor device additionally includes a third semiconductor structure having first and second opposing surfaces, the first surface of the third semiconductor structure having a third semiconductor package pitch which is different from at least the second semiconductor package pitch. The second and third semiconductor structures are provided on a same package level of the multi-layer semiconductor device. A corresponding method for fabricating a multi-layer semiconductor device is also provided.Type: ApplicationFiled: November 5, 2015Publication date: March 30, 2017Inventors: Rabindra N. DAS, Mark A. GOUKER, Pascale GOUKER, Leonard M. JOHNSON, Ryan C. JOHNSON