Patents by Inventor Mark Backues

Mark Backues has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automatic determination of fourier harmonic order for computation of spectral information for diffraction structures
    Patent number: 10481088
    Abstract: Automatic determination of Fourier harmonic order for computation of spectral information for diffraction structures described. An embodiment of a method includes automatically determining a Fourier harmonic order for computation of spectral information for periodic structures, wherein the determination of the Fourier harmonic order is based at least in part on the pitches in each of multiple directions of the periodic structures, material properties of the periodic structures, and characteristics of the periodic structures in which the materials are contained; and computing the spectral information for the periodic structures based at least in part on the determined Fourier harmonic order.
    Type: Grant
    Filed: June 2, 2014
    Date of Patent: November 19, 2019
    Assignee: KLA-TENCOR CORPORATION
    Inventors: Mark Backues, Paul Aoyagi, Leonid Poslavsky
  • AUTOMATIC DETERMINATION OF FOURIER HARMONIC ORDER FOR COMPUTATION OF SPECTRAL INFORMATION FOR DIFFRACTION STRUCTURES
    Publication number: 20140358476
    Abstract: Automatic determination of Fourier harmonic order for computation of spectral information for diffraction structures described. An embodiment of a method includes automatically determining a Fourier harmonic order for computation of spectral information for periodic structures, wherein the determination of the Fourier harmonic order is based at least in part on the pitches in each of multiple directions of the periodic structures, material properties of the periodic structures, and characteristics of the periodic structures in which the materials are contained; and computing the spectral information for the periodic structures based at least in part on the determined Fourier harmonic order.
    Type: Application
    Filed: June 2, 2014
    Publication date: December 4, 2014
    Inventors: Mark Backues, Paul Aoyagi, Leonid Poslavsky