Patents by Inventor Mark C. Hakey

Mark C. Hakey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9646125
    Abstract: A method is provided to convert commercial microprocessors to radiation-hardened processors and, more particularly, a method is provided to modify a commercial microprocessor for radiation hardened applications with minimal changes to the technology, design, device, and process base so as to facilitate a rapid transition for such radiation hardened applications. The method is implemented in a computing infrastructure and includes evaluating a probability that one or more components of an existing commercial design will be affected by a single event upset (SEU). The method further includes replacing the one or more components with a component immune to the SEU to create a final device.
    Type: Grant
    Filed: January 10, 2014
    Date of Patent: May 9, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: John A. Fifield, Mark C. Hakey, Jason D. Hibbeler, James S. Nakos, Tak H. Ning, Kenneth P. Rodbell, Ronald D. Rose, Henry H. K. Tang, Larry Wissel
  • Patent number: 8933559
    Abstract: Disclosed are embodiments of an improved semiconductor wafer structure having protected clusters of carbon nanotubes (CNTs) on the back surface and a method of forming the improved semiconductor wafer structure. Also disclosed are embodiments of a semiconductor module with exposed CNTs on the back surface for providing enhanced thermal dissipation in conjunction with a heat sink and a method of forming the semiconductor module using the disclosed semiconductor wafer structure.
    Type: Grant
    Filed: March 13, 2012
    Date of Patent: January 13, 2015
    Assignee: International Business Machines Corporation
    Inventors: Veeraraghavan S. Basker, Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, Charles W. Koburger, III, Krishna V. Singh
  • Patent number: 8890256
    Abstract: The invention relates to a design structure, and more particularly, to a design structure for a heavy ion tolerant device, method of manufacturing the same and a structure thereof. The structure includes a first device having a diffusion comprising a drain region and source region and a second device having a diffusion comprising a drain region and source region. The first and second device are aligned in an end-to-end layout along a width of the diffusion of the first device and the second device. A first isolation region separating the diffusion of the first device and the second device.
    Type: Grant
    Filed: March 20, 2009
    Date of Patent: November 18, 2014
    Assignee: International Business Machines Corporation
    Inventors: Mark C. Hakey, Tak H. Ning, Philip J. Oldiges, Henry H. K. Tang
  • Publication number: 20140258958
    Abstract: A method is provided to convert commercial microprocessors to radiation-hardened processors and, more particularly, a method is provided to modify a commercial microprocessor for radiation hardened applications with minimal changes to the technology, design, device, and process base so as to facilitate a rapid transition for such radiation hardened applications. The method is implemented in a computing infrastructure and includes evaluating a probability that one or more components of an existing commercial design will be affected by a single event upset (SEU). The method further includes replacing the one or more components with a component immune to the SEU to create a final device.
    Type: Application
    Filed: January 10, 2014
    Publication date: September 11, 2014
    Applicant: International Business Machines Corporation
    Inventors: John A. FIFIELD, Mark C. HAKEY, Jason D. HIBBELER, James S. NAKOS, Tak H. NING, Kenneth P. RODBELL, Ronald D. ROSE, Henry H.K. TANG, Larry WISSEL
  • Patent number: 8735990
    Abstract: The embodiments of the invention provide a structure and method for a rad-hard FinFET or mesa. More specifically, a semiconductor structure is provided having at least one fin or mesa comprising a channel region on an isolation region. A doped substrate region is also provided below the fin, wherein the doped substrate region has a first polarity opposite a second polarity of the channel region. The isolation region contacts the doped substrate region. The structure further includes a gate electrode covering the channel region and at least a portion of the isolation region. The gate electrode comprises a lower portion below the channel region of the fin, wherein the lower portion of the gate electrode comprises a height that is at least one-half of a thickness of the fin.
    Type: Grant
    Filed: February 28, 2007
    Date of Patent: May 27, 2014
    Assignee: International Business Machines Corporation
    Inventors: Brent A. Anderson, Robert H. Dennard, Mark C. Hakey, Edward J. Nowak
  • Patent number: 8568604
    Abstract: A sidewall image transfer process for forming sub-lithographic structures employs a layer of sacrificial material that is deposited over a structure layer and covered by a cover layer. The sacrificial material layer and the cover layer are patterned with conventional resist and etched to form a sacrificial mandrel. The edges of the mandrel are oxidized or nitrided in a plasma at low temperature, after which the material layer and the cover layer are stripped, leaving sublithographic sidewalls. The sidewalls are used as hardmasks to etch sublithographic gate structures in the gate conductor layer.
    Type: Grant
    Filed: August 5, 2008
    Date of Patent: October 29, 2013
    Assignee: International Business Machines Corporation
    Inventors: Bruce B. Doris, Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III
  • Patent number: 8541823
    Abstract: A transistor. The transistor including: a well region in a substrate; a gate dielectric layer on a top surface of the well region; a polysilicon gate electrode on a top surface of the gate dielectric layer; spacers formed on opposite sidewalls of the polysilicon gate electrode; source/drain regions formed on opposite sides of the polysilicon gate electrode in the well region; a first doped region in the polysilicon gate electrode, the first doped region extending into the polysilicon gate electrode from a top surface of the polysilicon gate electrode; and a buried second doped region in the polysilicon gate electrode.
    Type: Grant
    Filed: July 11, 2011
    Date of Patent: September 24, 2013
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III
  • Patent number: 8512458
    Abstract: A carbon nanotube filter, a use for a carbon nanotube filter and a method of forming a carbon nanotube filter. The method including (a) providing a carbon source and a carbon nanotube catalyst; (b) growing carbon nanotubes by reacting the carbon source with the nanotube catalyst; (c) forming chemically active carbon nanotubes by forming a chemically active layer on the carbon nanotubes or forming chemically reactive groups on sidewalls of the carbon nanotubes; and (d) placing the chemically active nanotubes in a filter housing.
    Type: Grant
    Filed: July 2, 2008
    Date of Patent: August 20, 2013
    Assignee: International Business Machines Corporation
    Inventors: Steven J. Holmes, Mark C. Hakey, David V. Horak, James G. Ryan
  • Patent number: 8299605
    Abstract: Disclosed are embodiments of an improved semiconductor wafer structure having protected clusters of carbon nanotubes (CNTs) on the back surface and a method of forming the improved semiconductor wafer structure. Also disclosed are embodiments of a semiconductor module with exposed CNTs on the back surface for providing enhanced thermal dissipation in conjunction with a heat sink and a method of forming the semiconductor module using the disclosed semiconductor wafer structure.
    Type: Grant
    Filed: November 14, 2007
    Date of Patent: October 30, 2012
    Assignee: International Business Machines Corporation
    Inventors: Veeraraghavan S Basker, Toshiharu Furukawa, Mark C Hakey, Steven J Holmes, Charles W Koburger, III, Krishna V Singh
  • Patent number: 8284017
    Abstract: A design structure including a pair of substantially parallel resistor material lengths separated by a first dielectric are disclosed. The resistor material lengths have a sub-lithographic dimension and may be spacer shaped.
    Type: Grant
    Filed: October 27, 2011
    Date of Patent: October 9, 2012
    Assignee: International Business Machines Corporation
    Inventors: Mark C. Hakey, Stephen E. Luce, James S. Nakos
  • Publication number: 20120168931
    Abstract: Disclosed are embodiments of an improved semiconductor wafer structure having protected clusters of carbon nanotubes (CNTs) on the back surface and a method of forming the improved semiconductor wafer structure. Also disclosed are embodiments of a semiconductor module with exposed CNTs on the back surface for providing enhanced thermal dissipation in conjunction with a heat sink and a method of forming the semiconductor module using the disclosed semiconductor wafer structure.
    Type: Application
    Filed: March 13, 2012
    Publication date: July 5, 2012
    Applicant: International Business Machines Corporation
    Inventors: Veeraraghavan S. Basker, Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, Charles W. Koburger, III, Krishna V. Singh
  • Publication number: 20120042298
    Abstract: A design structure including a pair of substantially parallel resistor material lengths separated by a first dielectric are disclosed. The resistor material lengths have a sub-lithographic dimension and may be spacer shaped.
    Type: Application
    Filed: October 27, 2011
    Publication date: February 16, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Mark C. Hakey, Stephen E. Luce, James S. Nakos
  • Patent number: 8111129
    Abstract: A resistor and design structure including a pair of substantially parallel resistor material lengths separated by a first dielectric are disclosed. The resistor material lengths have a sub-lithographic dimension and may be spacer shaped.
    Type: Grant
    Filed: March 12, 2008
    Date of Patent: February 7, 2012
    Assignee: International Business Machines Corporation
    Inventors: Mark C. Hakey, Stephen E. Luce, James S. Nakos
  • Publication number: 20110266621
    Abstract: A transistor. The transistor including: a well region in a substrate; a gate dielectric layer on a top surface of the well region; a polysilicon gate electrode on a top surface of the gate dielectric layer; spacers formed on opposite sidewalls of the polysilicon gate electrode; source/drain regions formed on opposite sides of the polysilicon gate electrode in the well region; a first doped region in the polysilicon gate electrode, the first doped region extending into the polysilicon gate electrode from a top surface of the polysilicon gate electrode; and a buried second doped region in the polysilicon gate electrode.
    Type: Application
    Filed: July 11, 2011
    Publication date: November 3, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III
  • Patent number: 8044764
    Abstract: A resistor and design structure including at least one resistor material length in a dielectric, each of the least one resistor material length having a sub-lithographic width are disclosed.
    Type: Grant
    Filed: March 12, 2008
    Date of Patent: October 25, 2011
    Assignee: International Business Machines Corporation
    Inventors: Mark C. Hakey, Stephen E. Luce, James S. Nakos
  • Patent number: 8039334
    Abstract: A semiconductor structure in which a planar semiconductor device and a horizontal carbon nanotube transistor have a shared gate and a method of fabricating the same are provided in the present application. The hybrid semiconductor structure includes at least one horizontal carbon nanotube transistor and at least one planar semiconductor device, in which the at least one horizontal carbon nanotube transistor and the at least one planar semiconductor device have a shared gate and the at least one horizontal carbon nanotube transistor is located above a gate of the at least one planar semiconductor device.
    Type: Grant
    Filed: October 12, 2010
    Date of Patent: October 18, 2011
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III, Mark E. Masters
  • Patent number: 8004024
    Abstract: A transistor. The transistor including: a well region in a substrate; a gate dielectric layer on a top surface of the well region; a polysilicon gate electrode on a top surface of the gate dielectric layer; spacers formed on opposite sidewalls of the polysilicon gate electrode; source/drain regions formed on opposite sides of the polysilicon gate electrode in the well region; a first doped region in the polysilicon gate electrode, the first doped region extending into the polysilicon gate electrode from a top surface of the polysilicon gate electrode; and a buried second doped region in the polysilicon gate electrode.
    Type: Grant
    Filed: January 5, 2009
    Date of Patent: August 23, 2011
    Assignee: International Business Machines Corporation
    Inventors: Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III
  • Patent number: 7932549
    Abstract: A trench-type storage device includes a trench in a substrate (100), with bundles of carbon nanotubes (202) lining the trench and a trench conductor (300) filling the trench. A trench dielectric (200) may be formed between the carbon nanotubes and the sidewall of the trench. The bundles of carbon nanotubes form an open cylinder structure lining the trench. The device is formed by providing a carbon nanotube catalyst structure on the substrate and patterning the trench in the substrate; the carbon nanotubes are then grown down into the trench to line the trench with the carbon nanotube bundles, after which the trench is filled with the trench conductor.
    Type: Grant
    Filed: December 18, 2003
    Date of Patent: April 26, 2011
    Assignee: International Business Machines Corporation
    Inventors: Steven J. Holmes, Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Larry A. Nesbit
  • Publication number: 20110088008
    Abstract: A method is provided to convert commercial microprocessors to radiation-hardened processors and, more particularly, a method is provided to modify a commercial microprocessor for radiation hardened applications with minimal changes to the technology, design, device, and process base so as to facilitate a rapid transition for such radiation hardened applications. The method is implemented in a computing infrastructure and includes evaluating a probability that one or more components of an existing commercial design will be affected by a single event upset (SEU). The method further includes replacing the one or more components with a component immune to the SEU to create a final device.
    Type: Application
    Filed: October 14, 2009
    Publication date: April 14, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: John A. FIFIELD, Mark C. HAKEY, Jason D. HIBBELER, James S. NAKOS, Tak H. NING, Kenneth P. RODBELL, Ronald D. ROSE, Henry H.K. TANG, Larry WISSEL
  • Patent number: 7922796
    Abstract: A carbon nanotube filter. The filter including a filter housing; and chemically active carbon nanotubes within the filter housing, the chemically active carbon nanotubes comprising a chemically active layer formed on carbon nanotubes or comprising chemically reactive groups on sidewalls of the carbon nanotubes; and media containing the chemically active carbon nanotubes.
    Type: Grant
    Filed: January 6, 2010
    Date of Patent: April 12, 2011
    Assignee: International Business Machines Corporation
    Inventors: Steven J. Holmes, Mark C. Hakey, David V. Horak, James G. Ryan