Patents by Inventor Mark D. Norris

Mark D. Norris has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Testing device for semiconductor components and a method of using the device
    Patent number: 6541989
    Abstract: A testing device for semiconductor components and a method of making the device is described. The testing device includes a support structure having an outer edge, and an adhesive film disposed on the support structure to hold a semiconductor wafer in position on the support structure so that neither the adhesive film nor the semiconductor wafer extends beyond the outer edge of the support structure.
    Type: Grant
    Filed: September 29, 2000
    Date of Patent: April 1, 2003
    Assignee: Motorola, Inc.
    Inventors: Mark D. Norris, Jeffrey S. Hughes, Roy Russell Brown
  • Wafer holder for semiconductor applications
    Patent number: 5703493
    Abstract: A semiconductor substrate (15) is placed into a recessed area (12) of a support structure (10). A ring (20) is then placed on the support structure (10) to form a wafer holder (30) which provides support to the semiconductor substrate (15) during handling, transporting, or electrical testing operations. The recessed area (12) can also have a vacuum opening (13) and a vacuum groove (17) so a vacuum pressure can be applied to the backside of semiconductor substrate (15). This will correct for any warpage or bowing in the semiconductor substrate (15) so a planar surface is formed for the electrical testing operation. The wafer holder (30) also has a flat (16) so the wafer holder (30) can be aligned and processed like a wafer with a diameter larger than the semiconductor substrate (15).
    Type: Grant
    Filed: October 25, 1995
    Date of Patent: December 30, 1997
    Assignee: Motorola, Inc.
    Inventors: Anthony R. Weeks, Mark D. Norris, Steven A. Switzer