Patents by Inventor Mark F. Eaton
Mark F. Eaton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10748734Abstract: An efficient source of EUV or SXR flux uses multiple e-beams from multiple cathodes to impact a wide anode target with a flux-generating surface to generate flux over a wide area. The conversion efficiency of e-beam power to flux power may be improved by the direction of the e-beams towards the anode target at shallow or grazing incidence angles or the use of mirrored anode surfaces which reflect EUV or SXR. The source is enclosed in a vacuum chamber and performs work such as the penetration of photoresist on a semiconductor wafer in vacuum.Type: GrantFiled: September 5, 2016Date of Patent: August 18, 2020Assignee: STELLARRAY, INC.Inventors: Mark F Eaton, Robert J. Hollingsworth
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Publication number: 20180068821Abstract: An efficient source of EUV or SXR flux uses multiple e-beams from multiple cathodes to impact a wide anode target with a flux-generating surface to generate flux over a wide area. The conversion efficiency of e-beam power to flux power may be improved by the direction of the e-beams towards the anode target at shallow or grazing incidence angles or the use of mirrored anode surfaces which reflect EUV or SXR. The source is enclosed in a vacuum chamber and performs work such as the penetration of photoresist on a semiconductor wafer in vacuum.Type: ApplicationFiled: September 5, 2016Publication date: March 8, 2018Applicant: Stellarray, Inc.Inventor: Mark F. Eaton
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Patent number: 9508523Abstract: This invention provides a source of x-ray flux in which x-rays are produced by e-beams impacting the inner walls of holes or channels formed in a metal anode such that most of the electrons reaching the channel impact an upper portion of said channel. A portion of the electrons from this primary impact will generate x-rays. Most of the electrons scatter but they continue to ricochet down the channel, most of them generating x-rays, until the beam is spent. A single channel source of high power efficiency and high power level x-rays may be made in this way, or the source can be of an array of such channels, to produce parallel collimated flux beams of x-rays.Type: GrantFiled: March 15, 2014Date of Patent: November 29, 2016Assignee: STELLARRAY, INC.Inventors: Mark F Eaton, Mark Lucente
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Patent number: 9242019Abstract: A pipe source of UV flux has an inner pipe made of UV transmissive material and coated on its outer surface with a UV emitting phosphor. An outer pipe has a cathode array disposed on or near its inner surface, such as an array of thermionic filament cathodes mounted longitudinally or transverse to the length of the pipe, cold cathode arrays formed on the inner surface of the pipe or cold cathode arrays formed on separate substrates which are then attached to the inner surface of the outer pipe. The ends of this two-pipe assembly are hermetically sealed with flanges or end plates at either end of the pipe and evacuated to a pressure below 1×10?3 Torr. Internal spacing rings may be used to provide additional separation between the inner and out pipes. Current from the cathode arrays is accelerated by an anode voltage to strike the UV phosphors when then emit UV light flux which illuminates the inside of the pipe and the fluid material flowing through the inner pipe.Type: GrantFiled: March 13, 2014Date of Patent: January 26, 2016Assignee: STELLARRAY, INCORPORATEDInventor: Mark F Eaton
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Publication number: 20150262779Abstract: A flat panel UV source emits UV flux from one or more phosphor materials disposed on an anode plate and excited by electron beam current accelerated in vacuum toward the anode from one or more arrays of thermionic filament cathodes. The filament cathode arrays may be constructed and held in one or more cathode frames attached to or near a cathode plate. Increasing the number of these frames allows scaling of the areal size of the source, since the frames are constructed so as to allow for sag of the filaments as they are heated and cooled during operation.Type: ApplicationFiled: March 13, 2014Publication date: September 17, 2015Applicant: Stellarray, Inc.Inventor: Mark F. Eaton
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Publication number: 20150262780Abstract: A pipe source of UV flux has an inner pipe made of UV transmissive material and coated on its outer surface with a UV emitting phosphor. An outer pipe has a cathode array disposed on or near its inner surface, such as an array of thermionic filament cathodes mounted longitudinally or transverse to the length of the pipe, cold cathode arrays formed on the inner surface of the pipe or cold cathode arrays formed on separate substrates which are then attached to the inner surface of the outer pipe. The ends of this two-pipe assembly are hermetically sealed with flanges or end plates at either end of the pipe and evacuated to a pressure below 1×10?3 Torr. Internal spacing rings may be used to provide additional separation between the inner and out pipes. Current from the cathode arrays is accelerated by an anode voltage to strike the UV phosphors when then emit UV light flux which illuminates the inside of the pipe and the fluid material flowing through the inner pipe.Type: ApplicationFiled: March 13, 2014Publication date: September 17, 2015Applicant: STELLARRAY, INC.Inventor: Mark F. Eaton
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Publication number: 20150262783Abstract: This invention provides a source of x-ray flux in which x-rays are produced by e-beams impacting the inner walls of holes or channels formed in a metal anode such that most of the electrons reaching the channel impact an upper portion of said channel. A portion of the electrons from this primary impact will generate x-rays. Most of the electrons scatter but they continue to ricochet down the channel, most of them generating x-rays, until the beam is spent. A single channel source of high power efficiency and high power level x-rays may be made in this way, or the source can be of an array of such channels, to produce parallel collimated flux beams of x-rays.Type: ApplicationFiled: March 15, 2014Publication date: September 17, 2015Applicant: Stellarray, Inc.Inventors: Mark F. Eaton, Mark Lucente
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Publication number: 20130272503Abstract: A radiation source which can emit X-ray flux using electron beam currents from a cathode array formed on the window through which the radiation will exit the source. The source can be made in formats which are compact or flat compared with prior art radiation sources. X-ray flux produced by the source can be used for such purposes as radiation imaging, sterilization, decontamination of biohazards or photolithography.Type: ApplicationFiled: September 28, 2012Publication date: October 17, 2013Applicant: Stellarray, Inc.Inventor: Mark F. Eaton
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Patent number: 8394679Abstract: A structure and method for cold weld compression bonding using a metallic nano-structured gasket is provided. This structure and method allows a hermetic package to be formed at lower pressures and temperatures than are possible using bulk or conventional thin-film gasket materials.Type: GrantFiled: September 1, 2010Date of Patent: March 12, 2013Assignee: Stellarray, Inc.Inventors: Mark F Eaton, Curtis Nathan Potter, Andrew Miner
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Patent number: 8155273Abstract: A radiation source which can emit X-ray flux using electron beam currents from a cathode array formed on the window through which the radiation will exit the source. The source can be made in formats which are compact or flat compared with prior art radiation sources. X-ray flux produced by the source can be used for such purposes as radiation imaging, sterilization, decontamination of biohazards or photolithography.Type: GrantFiled: August 29, 2008Date of Patent: April 10, 2012Assignee: Stellar Micro DevicesInventors: Mark F. Eaton, Leonid D. Karpov
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Publication number: 20110272796Abstract: A structure and method for cold weld compression bonding using a metallic nano-structured gasket is provided. This structure and method allows a hermetic package to be formed at lower pressures and temperatures than are possible using bulk or conventional thin-film gasket materials.Type: ApplicationFiled: September 1, 2010Publication date: November 10, 2011Inventors: Mark F. Eaton, Curtis Nathan Potter, Andrew Miner
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Publication number: 20090080614Abstract: A radiation source which can emit X-ray flux, UV-C flux and other forms of radiation uses electron beam current from a cathode array formed on the window through which the radiation will exit the source. The source can be made in formats which are compact or flat compared with prior art radiation sources. X-ray, UV-C and other radiative flux produced by the source can be used for such purposes as radiation imaging, sterilization, decontamination of biohazards, UV curing or photolithography.Type: ApplicationFiled: August 29, 2008Publication date: March 26, 2009Applicant: STELLAR MICRO DEVICES, INC.Inventors: Mark F. Eaton, Leonid D. Karpov
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Patent number: 6607930Abstract: A method for fabricating a thin-film edge emitter device includes the steps of providing a first conductive layer having a top surface; providing an insulating layer having a top surface disposed above the top surface of the first conductive layer; providing a second conductive layer on the insulating layer; and providing a well in the insulating layer over the first conductive layer and an edge in the second conductive layer proximate the well. Providing the well and the edge includes processing the first conductive, insulating, and second conductive layers by at least one of lift-off processing, photolithography processing, and processing with the use of a pre-formed insulating layer having at least one opening associated with a location of the well. The first conductive layer forms an anode. Lastly, the second conductive layer forms at least one of a cladded cathode having an emissive edge and a control electrode.Type: GrantFiled: February 5, 2002Date of Patent: August 19, 2003Assignee: Stellar Display CorporationInventors: Leonid Danielovitch Karpov, Mark F. Eaton
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Publication number: 20020146853Abstract: A method for fabricating a thin-film edge emitter device includes the steps of providing a first conductive layer having a top surface; providing an insulating layer having a top surface disposed above the top surface of the first conductive layer; providing a second conductive layer on the insulating layer; and providing a well in the insulating layer over the first conductive layer and an edge in the second conductive layer proximate the well. Providing the well and the edge includes processing the first conductive, insulating, and second conductive layers by at least one of lift-off processing, photolithography processing, and processing with the use of a pre-formed insulating layer having at least one opening associated with a location of the well. The first conductive layer forms an anode. Lastly, the second conductive layer forms at least one of a cladded cathode having an emissive edge and a control electrode.Type: ApplicationFiled: February 5, 2002Publication date: October 10, 2002Applicant: Stellar Display CorporationInventors: Leonid Danielovitch Karpov, Mark F. Eaton