Patents by Inventor Mark G. Messer

Mark G. Messer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer arm handler mechanism
    Patent number: 5096364
    Abstract: A wafer handler arm conveys a wafer from a horizontal orientation to a vertical orientation for wafer processing. The arm includes a wafer holding member which is rigidly attached to a first shaft. The first shaft is rotatable about its longitudinal axis and the first shaft is rotatable about a second axis perpendicular to the first axis.
    Type: Grant
    Filed: October 11, 1990
    Date of Patent: March 17, 1992
    Assignee: Varian Associates, Inc.
    Inventors: Mark G. Messer, Lawrence R. Stark
  • Sputter module for modular wafer processing system
    Patent number: 4670126
    Abstract: A machine for sputter deposition of a wafer workpiece also sputters on the wafer supporting mechanism. This causes a need for cleaning or replacement of the support mechanism. A sputter machine is provided in which the supporting mechanism can be isolated from the sputtering source, the pumps and other processing apparatus for cleaning without exposing the entire machine to atmosphere.
    Type: Grant
    Filed: April 28, 1986
    Date of Patent: June 2, 1987
    Assignee: Varian Associates, Inc.
    Inventors: Mark G. Messer, Lawrence R. Stark