Patents by Inventor Mark K. Tan

Mark K. Tan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum robot positioning system with reduced sensitivity to chamber pressure
    Patent number: 10483142
    Abstract: A system for mounting vacuum robot arms in horizontally elongate vacuum transfer modules is provided. The system provides mechanical isolation to the vacuum robot arm against deflections in the housing of the vacuum transfer module due to depressurization of the interior of the vacuum transfer module while the exterior of the vacuum transfer module is subjected to atmospheric pressure. Such systems may prevent undesirable, larger displacements of the end effector of such vacuum robot arms due to the deflection.
    Type: Grant
    Filed: September 14, 2018
    Date of Patent: November 19, 2019
    Assignee: Lam Research Corporation
    Inventors: Mark K. Tan, Christopher William Burkhart, Richard M. Blank, Richard H. Gould
  • Mass damper for semiconductor wafer handling end effector
    Patent number: 8985935
    Abstract: A calibrated mass damper for use with end effectors for semiconductor wafer handling robots is described. The calibrated mass damper reduces vibrational response in an end effector carrying a semiconductor wafer without requiring modification of the end effector structure.
    Type: Grant
    Filed: February 1, 2013
    Date of Patent: March 24, 2015
    Assignee: Novellus Systems, Inc.
    Inventors: Mark K. Tan, Nicholas M. Kopec, Richard M. Blank
  • MASS DAMPER FOR SEMICONDUCTOR WAFER HANDLING END EFFECTOR
    Publication number: 20130213169
    Abstract: A calibrated mass damper for use with end effectors for semiconductor wafer handling robots is described. The calibrated mass damper reduces vibrational response in an end effector carrying a semiconductor wafer without requiring modification of the end effector structure.
    Type: Application
    Filed: February 1, 2013
    Publication date: August 22, 2013
    Inventors: Mark K. Tan, Nicholas M. Kopec, Richard M. Blank