Patents by Inventor Mark Richard Hawkins

Mark Richard Hawkins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for adjusting semiconductor processing equipment
    Patent number: 6126744
    Abstract: A method to prepare thermal reactors for operation after installation, modification, upgrade and routine preventive maintenance operations. Variations in reaction rate across a wafer surface are used to determine corresponding variations in surface temperature across the wafer surface. Surface temperature variations results in thickness variations of a chemically deposited layer. For selected thicknesses, a chemically deposited layer is transparent and exhibits color variations corresponding to the thickness variations that result from the surface temperature variations. These color variations are then correlated to surface temperature variations to enable wafer heating adjustments to reduce surface temperature variations.
    Type: Grant
    Filed: August 15, 1997
    Date of Patent: October 3, 2000
    Assignee: ASM America, Inc.
    Inventors: Mark Richard Hawkins, Robert Michael Vyne, Cornelius Alexander van der Jeugd