Patents by Inventor Mark Rouillard

Mark Rouillard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9305768
    Abstract: A method for processing flat articles with acoustical energy. The inventive system method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.
    Type: Grant
    Filed: November 27, 2012
    Date of Patent: April 5, 2016
    Inventors: Fani Pejman, Mark Rouillard, John Korbler, James Brown, Chad Hosack
  • Publication number: 20130333723
    Abstract: A method for processing flat articles with acoustical energy. The inventive system method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.
    Type: Application
    Filed: November 27, 2012
    Publication date: December 19, 2013
    Applicant: Akrion Systems, LLC
    Inventors: Pejman Fani, Mark Rouillard, John Korbler, James Brown, Chad Hosack
  • Patent number: 8316869
    Abstract: A system, apparatus and method for processing flat articles with acoustical energy. The inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system and/or method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.
    Type: Grant
    Filed: August 30, 2010
    Date of Patent: November 27, 2012
    Inventors: Pejman Fani, Mark Rouillard, John Korbler, James Brown, Chad Hosack
  • Patent number: 7946299
    Abstract: A spray cleaning device having an atomizing unit with at least one gas passage and at least one cleaning fluid passage converging into a atomizing area. The gas flowing though the gas passage and the cleaning fluid flowing through the cleaning fluid passages combine to form a mixture at the atomizing area. The accelerating unit has an acceleration passage for spraying the mixture onto a substrate surface. The gas passages are preferably angled with respect to the cleaning acceleration passage.
    Type: Grant
    Filed: May 8, 2007
    Date of Patent: May 24, 2011
    Inventors: Cole Franklin, Mark Rouillard, Yan Fan
  • Publication number: 20100326464
    Abstract: A system, apparatus and method for processing flat articles with acoustical energy. The inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system and/or method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.
    Type: Application
    Filed: August 30, 2010
    Publication date: December 30, 2010
    Inventors: Pejman Fani, Mark Rouillard, John Korbler, James Brown, Chad Hosack
  • Patent number: 7784478
    Abstract: A system, apparatus and method for processing flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system for processing flat articles comprising: a first dispenser for applying a liquid to a first surface of a flat article; a second dispenser for applying liquid to a second surface of a flat article; a first transducer assembly positioned so as to transmit acoustical energy to the first surface of the flat article; and a second transducer assembly positioned so as to transmit acoustical energy to the second surface of the flat article.
    Type: Grant
    Filed: January 22, 2007
    Date of Patent: August 31, 2010
    Inventors: Pejman Fani, Mark Rouillard, John Korbler, James Brown, Chad Hosack
  • Publication number: 20070261716
    Abstract: A spray cleaning device having an atomizing unit with at least one gas passage and at least one cleaning fluid passage converging into a atomizing area. The gas flowing though the gas passage and the cleaning fluid flowing through the cleaning fluid passages combine to form a mixture at the atomizing area. The accelerating unit has an acceleration passage for spraying the mixture onto a substrate surface. The gas passages are preferably angled with respect to the cleaning acceleration passage.
    Type: Application
    Filed: May 8, 2007
    Publication date: November 15, 2007
    Inventors: Cole Franklin, Mark Rouillard, Yan Fan
  • Publication number: 20070169800
    Abstract: A system, apparatus and method for processing this flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively.
    Type: Application
    Filed: January 22, 2007
    Publication date: July 26, 2007
    Inventors: Pejman Fani, Mark Rouillard, John Korbler, James Brown, Chad Hosack
  • Publication number: 20070170812
    Abstract: A wafer cleaning system having a crystal or ceramic transducer assembly. The transducer assembly is adapted to convert electrical energy into sonic energy. The crystal or ceramic has a first conductive surface. The transducer assembly also has a transmitter made of an inert non-reactive plastic that transmits the sonic energy generated by the crystal or ceramic. The transmitter has a surface bonded directly to the conductive surface of the crystal or ceramic.
    Type: Application
    Filed: January 22, 2007
    Publication date: July 26, 2007
    Inventors: Pejman Fani, Mark Rouillard
  • Patent number: 7087005
    Abstract: A handgrip and leg brace assembly is located over a horizontal bench portion of a stretch bench that receives and supports a user's upper torso. The handgrip is adjustable in the horizontal and vertical planes as stretching exercises are on-going and without the user leaving the bench proper. Additional bench adjustments provide an individualized height setting, and these combined adjustments allow the bench to be personalized for each given individual in order to increase the effectiveness of certain on-the-bench stretching activities.
    Type: Grant
    Filed: April 2, 2003
    Date of Patent: August 8, 2006
    Inventor: Mark Rouillard
  • Publication number: 20040198572
    Abstract: A handgrip and leg brace assembly is located over a horizontal bench portion of a stretch bench that receives and supports a user's upper torso. The handgrip is adjustable in the horizontal and vertical planes as stretching exercises are on-going and without the user leaving the bench proper. Additional bench adjustments provide an individualized height setting, and these combined adjustments allow the bench to be personalized for each given individual in order to increase the effectiveness of certain on-the-bench stretching activities.
    Type: Application
    Filed: April 2, 2003
    Publication date: October 7, 2004
    Inventor: Mark Rouillard
  • Patent number: 5472401
    Abstract: A ramped and horizontal stretching bench for relieving spinal and muscle conditions contributing to back pain. More particularly a stretching bench that has moveable and adjustable settings for increasing the effectiveness of such relief. An arm brace and hand grip assembly is located under a horizontal bench portion that receives and supports a user's upper torso. The arm brace is readily adjustable as stretching exercises are on-going and without the user leaving the bench proper. Additional bench adjustments provide an individualized height setting, and these combined adjustments allow the bench to be personalized for each given individual in order to increase the effectiveness of certain on-the-bench stretching activities.
    Type: Grant
    Filed: April 12, 1994
    Date of Patent: December 5, 1995
    Inventors: Mark A. Rouillard, Donald W. Hartford
  • Patent number: D360663
    Type: Grant
    Filed: December 11, 1992
    Date of Patent: July 25, 1995
    Inventors: Mark A. Rouillard, Donald W. Hartford