Abstract: Techniques are provided for laser illumination employing closely spaced laser beams. A system implementing the techniques according to an embodiment includes a semi-cylindrical optical block comprising a curved surface and a planar surface. A first laser source to generate a first laser beam directed to the planar surface, wherein the first laser beam enters the optical block at a first angle that exceeds a critical angle, relative to the planar surface, the critical angle causing total internal reflection, such that the first laser beam is refracted through and exits the optical block.

Abstract: A laser transmission apparatus utilizing multiple laser beams and beam paths with a diverger lens to provide an illumination pattern that can compensate for lateral movement of the platform during shearography is provided. Further, this optical setup requires no moving parts and does not reduce power of the laser beams as they move through the individual components thereof. From the perspective of the surface being scanned or inspected, the present disclosure may provide two laser images of a single surface that appear to be identical despite the fact that they were taken from two different spatial positions of the moving platform.

Abstract: Techniques are provided for laser illumination employing closely spaced laser beams. A system implementing the techniques according to an embodiment includes a semi-cylindrical optical block comprising a curved surface and a planar surface. A first laser source to generate a first laser beam directed to the planar surface, wherein the first laser beam enters the optical block at a first angle that exceeds a critical angle, relative to the planar surface, the critical angle causing total internal reflection, such that the first laser beam is refracted through and exits the optical block.

Abstract: A splitting and recombining optical component with an increased field of view while maintaining or only minimally increasing the space requirements therefor is provided.

Abstract: A laser transmission apparatus utilizing multiple laser beams and beam paths with a diverger lens to provide an illumination pattern that can compensate for lateral movement of the platform during shearography is provided. Further, this optical setup requires no moving parts and does not reduce power of the laser beams as they move through the individual components thereof. From the perspective of the surface being scanned or inspected, the present disclosure may provide two laser images of a single surface that appear to be identical despite the fact that they were taken from two different spatial positions of the moving platform.

Abstract: The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.

Abstract: The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.

Abstract: Quartz crystal resonators 30 with a first angle of rotation having an X-axis 17 and Z′-axis 19 lying within a plane corresponding to an AT-cut and a second angle of rotation 34 within the plane of the AT-cut and lying within a range of about ±1° to about ±11.5° from the Z′-axis of the AT-cut. The resonators includes substantially opposing electrodes 36 disposed on major faces of the quartz crystal plate 32. The second angle of rotation 34 results in quartz crystal resonators 30 being produced with a more uniform distribution of temperature performances.