Abstract: An optical element for microscopic inspection of a surface. The optical element has an elongated body defining an optical axis, with a first end adjacent the surface and a second end directed toward an imaging instrument. The body has a curved reflective surface and an optical aperture at the first end, and defines first and second associated focal points on the optical axis. The first focal point is spaced apart from the first end of the body, such that positioning the surface at the first focal point generates an image of the surface at the second focal point. The reflective surface may be paraboloidal, with a concentrating lens focusing collimated rays to the second focal point, so that a conventional microscope may view the image generated at the second point.

Abstract: Resolution of liquid crystal microthermographic measurements are improved by depositing a layer of organic pretreatment on the surface of a semiconductor device. A layer of thermographically sensitive liquid crystal material is then deposited on the organic pretreatment layer so that a controlled liquid crystal material layer thickness and an orientation of a majority of crystal molecules of the liquid crystal material parallel to the surface is achieved. The nominal temperature of the surface to be measured is controlled by sensing the nominal temperature near the surface, converting the sensed temperature to a current temperature sense signal, comparing the current temperature sense signal to a target temperature value, and activating a heater in thermal communication with the surface when the current temperature sense signal varies from the reference signal magnitude.