Abstract: A multi-mirror laser sustained plasma broadband light source is disclosed. The light source may include a gas containment structure for containing a gas. The light source includes a pump source configured to generate pump illumination and a first reflector element configured to direct a portion of the pump illumination into the gas to sustain a plasma. The first reflector is configured to collect a portion of broadband light emitted from the plasma. The light source also includes one or more additional reflector elements positioned opposite of the first reflector. The one or more additional reflector elements are configured to reflect unabsorbed pump illumination and broadband light uncollected by the first reflector element back to the plasma.

Abstract: Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region.

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract: Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region.

Abstract: Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region.

Abstract: Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region.

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract: Methods and systems for variable polarization wafer inspection are provided. One system includes one or more polarizing components position in one or more paths of light scattered from a wafer and detected by one or more channels of an inspection system. The polarizing component(s) are configured to have detection polarization(s) that are selected from two or more polarization settings for the polarizing component(s).

Abstract: Methods and systems for variable polarization wafer inspection are provided. One system includes one or more polarizing components position in one or more paths of light scattered from a wafer and detected by one or more channels of an inspection system. The polarizing component(s) are configured to have detection polarization(s) that are selected from two or more polarization settings for the polarizing component(s).

Abstract: An aspheric optical element corrects the non-linearity of the scan line in a ROS. The optical element can be either the wobble correction mirror, the last optical element in the ROS, or the output window, subsequent to the ROS. The optical element deflects the scan beam to cancel the non-linearity of the scan line caused by the residual errors in the ROS lens design. The aspheric optical element can also correct scan line bow.

Abstract: A strip neutral density filter varies the Gaussian intensity profile of the modulated light beam in an overfilled raster output scanner to provide a generally uniform intensity light beam spot at the photosensitive medium. The strip neutral density filter is positioned in the light beam path between the emitting laser source and the rotating polygon mirror of the raster output scanner.

Abstract: The multi-channel optical head for recording and reading optical storage data has a write laser array for generating a plurality of write beams and a read laser array for generating a plurality of read beams. The write beams and the read beams share a common optical path with a first broadband non-polarizing beam splitter which directs the beams towards the optical recording medium or to a power detector and with a second broadband non-polarizing beam splitter which directs the write beams and the read beams to the optical recording medium and which directs the read beams, after retroreflection and information modulation from the optical recording medium, to be split by a beam splitter and focused onto a detector to provide focusing information and another detector which detects its intensity to read data and provides tracking information.

Abstract: The multi-channel optical head for recording and reading optical storage data has a write laser array for generating a plurality of write beams and a read laser array for generating a plurality of read beams. The write beams and the read beams share a common optical path with a first broadband non-polarizing beam splitter which directs the beams towards the optical recording medium or to a power detector and with a second broadband non-polarizing beam splitter which directs the write beams and the read beams to the optical recording medium and which directs the read beams, after retroreflection and information modulation from the optical recording medium, to be split by a beam splitter and focused onto a detector to provide focusing information and another detector which detects its intensity to read data and provides tracking information.

Abstract: A single rotating polygon mirror with v-shaped facets having upper and lower reflective facet surfaces reflects and separates dual beams to two photoreceptors in a ROS. Each facet surface will have a different tilt angle. The two independently modulated beams will share common optical elements between the light sources and the mirror and may share a common f-theta scan lens. Two sets of two beams can be incident upon the facets on opposite sides of the rotating polygon mirror. The polygon mirror facet can also have three or four reflective facet surfaces to reflect and separate three or four independently modulated beams to three or four different photoreceptors.

Abstract: A single rotating polygon mirror with adjacent facets having different tilt angles reflects and splits the scanning beam to multiple photoreceptors in a raster output scanning (ROS) system. The mirror can have two or four alternating facets with different tilt angles. Two different light beams form two different light sources can be reflected and split from the polygon mirror contemporaneously to multiple photoreceptors. The split beams from the polygon mirror facets can share a common f-theta scan lens.

Abstract: A barcode scanner includes a light source for producing a scan line of light on a 2-D barcode along one of the two axes thereof. The scan line is scanned across the barcode along the other axis to effect a scanning band extending over the barcode in both of the two axes. Light reflected from the barcode is collected with a photodetector array to produce signals which are processed for decoding the barcode in both axes.