Patents by Inventor Mark William Curry

Mark William Curry has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11688621
    Abstract: A batch processing oven comprising a processing chamber and a rack configured to be positioned in the processing chamber. The rack is configured to support a plurality of substrates and a plurality of panels in a stacked manner such that one or more substrates of the plurality of substrates are positioned between at least one pair of adjacent panels of the plurality panels. Vertical gaps separate each substrate of the one or more substrates from an adjacent substrate or panel on either side of the substrate.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: June 27, 2023
    Assignee: YIELD ENGINEERING SYSTEMS, INC.
    Inventors: Mark William Curry, Ronald R. Stevens, Craig W. McCoy, Charudatta Galande, Gabriel Ormonde
  • Publication number: 20220189809
    Abstract: A batch processing oven comprising a processing chamber and a rack configured to be positioned in the processing chamber. The rack is configured to support a plurality of substrates and a plurality of panels in a stacked manner such that one or more substrates of the plurality of substrates are positioned between at least one pair of adjacent panels of the plurality panels. Vertical gaps separate each substrate of the one or more substrates from an adjacent substrate or panel on either side of the substrate.
    Type: Application
    Filed: March 31, 2021
    Publication date: June 16, 2022
    Applicant: Yield Engineering Systems, Inc.
    Inventors: Mark William Curry, Ronald R. Stevens, Craig W. McCoy, Charudatta Galande, Gabriel Ormonde
  • Patent number: 6966967
    Abstract: A method and apparatus for monitoring operating characteristics and/or control signals of a system comprising a variable speed vacuum pump. Operating characteristics and/or control signals of the system may be monitored, and the pumping speed of the variable speed vacuum pump may be altered responsive to the monitored operating characteristics and/or control signals.
    Type: Grant
    Filed: March 26, 2003
    Date of Patent: November 22, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Mark William Curry, Daniel Paul Greenbank, Danny Cam Toan Lu
  • Patent number: 6739840
    Abstract: Method, article of manufacture and apparatus for monitoring operating characteristics of a system comprising a variable speed vacuum pump. Operating characteristics reflective of gas load on the pump are observed for behavior indicating a change in the gas load. In one embodiment, the operating characteristic is the current in a power signal being provided to the pump.
    Type: Grant
    Filed: May 22, 2002
    Date of Patent: May 25, 2004
    Inventors: Mark William Curry, Daniel Paul Greenbank, Danny Cam Toan Lu
  • Publication number: 20040013531
    Abstract: A method and apparatus for monitoring operating characteristics and/or control signals of a system comprising a variable speed vacuum pump. Operating characteristics and/or control signals of the system may be monitored, and the pumping speed of the variable speed vacuum pump may be altered responsive to the monitored operating characteristics and/or control signals.
    Type: Application
    Filed: March 26, 2003
    Publication date: January 22, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Mark William Curry, Daniel Paul Greenbank, Danny Cam Toan Lu
  • Publication number: 20030219342
    Abstract: Method, article of manufacture and apparatus for monitoring operating characteristics of a system comprising a variable speed vacuum pump. Operating characteristics reflective of gas load on the pump are observed for behavior indicating a change in the gas load. In one embodiment, the operating characteristic is the current in a power signal being provided to the pump.
    Type: Application
    Filed: May 22, 2002
    Publication date: November 27, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Mark William Curry, Daniel Paul Greenbank, Danny Cam Toan Lu