Patents by Inventor Marko J. Hakovirta

Marko J. Hakovirta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for producing fluorinated diamond-like carbon films
    Patent number: 6572937
    Abstract: Fluorinated, diamond-like carbon (F-DLC) films are produced by a pulsed, glow-discharge plasma immersion ion processing procedure. The pulsed, glow-discharge plasma was generated at a pressure of 1 Pa from an acetylene (C2H2) and hexafluoroethane (C2F6) gas mixture, and the fluorinated, diamond-like carbon films were deposited on silicon <100>substrates. The film hardness and wear resistance were found to be strongly dependent on the fluorine content incorporated into the coatings. The hardness of the F-DLC films was found to decrease considerably when the fluorine content in the coatings reached about 20%. The contact angle of water on the F-DLC coatings was found to increase with increasing film fluorine content and to saturate at a level characteristic of polytetrafluoroethylene.
    Type: Grant
    Filed: November 30, 2000
    Date of Patent: June 3, 2003
    Assignee: The Regents of the University of California
    Inventors: Marko J. Hakovirta, Michael A. Nastasi, Deok-Hyung Lee, Xiao-Ming He
  • Method for producing fluorinated diamond-like carbon films
    Publication number: 20020098285
    Abstract: Fluorinated, diamond-like carbon (F-DLC) films are produced by a pulsed, glow-discharge plasma immersion ion processing procedure. The pulsed, glow-discharge plasma was generated at a pressure of 1 Pa from an acetylene (C2H2) and hexafluoroethane (C2F6) gas mixture, and the fluorinated, diamond-like carbon films were deposited on silicon <100>substrates. The film hardness and wear resistance were found to be strongly dependent on the fluorine content incorporated into the coatings. The hardness of the F-DLC films was found to decrease considerably when the fluorine content in the coatings reached about 20%. The contact angle of water on the F-DLC coatings was found to increase with increasing film fluorine content and to saturate at a level characteristic of polytetrafluoroethylene.
    Type: Application
    Filed: November 30, 2000
    Publication date: July 25, 2002
    Inventors: Marko J. Hakovirta, Michael A. Nastasi, Deok-Hyung Lee, Xiao-Ming He