Abstract: Systems and methods for improving process uniformity in a millisecond anneal system are provided. In some implementations, a process for thermally treating a substrate in a millisecond anneal system can include obtaining data indicative of a temperature profile associated with one or more substrates during processing in a millisecond anneal system. The process can include one or more of (1) changing the pressure inside the processing chamber of the millisecond anneal system; (2) manipulating the irradiation distribution by way of the refracting effect of a water window in the millisecond anneal system; (3) adjusting the angular positioning of the substrate; and/or (4) configuring the shape of the reflectors used in the millisecond anneal system.

Abstract: Preheat processes for a millisecond anneal system are provided. In one example implementation, a preheat process can include receiving a substrate on a wafer support plate in a processing chamber of a millisecond anneal system; obtaining one or more temperature measurements of the wafer support plate using a temperature sensor; and applying a preheat recipe to heat the wafer support plate based at least in part on the temperature of the wafer support plate. In one example implementation, a preheat process can include obtaining one or more temperature measurements from a temperature sensor having a field of view of a wafer support plate in a millisecond anneal system; and applying a pulsed preheat recipe to heat the wafer support plate in the millisecond anneal system based at least in part on the one or more temperature measurements.

Abstract: Systems and methods for improving process uniformity in a millisecond anneal system are provided. In some implementations, a process for thermally treating a substrate in a millisecond anneal system can include obtaining data indicative of a temperature profile associated with one or more substrates during processing in a millisecond anneal system. The process can include one or more of (1) changing the pressure inside the processing chamber of the millisecond anneal system; (2) manipulating the irradiation distribution by way of the refracting effect of a water window in the millisecond anneal system; (3) adjusting the angular positioning of the substrate; and/or (4) configuring the shape of the reflectors used in the millisecond anneal system.

Abstract: Preheat processes for a millisecond anneal system are provided. In one example implementation, a preheat process can include receiving a substrate on a wafer support plate in a processing chamber of a millisecond anneal system; obtaining one or more temperature measurements of the wafer support plate using a temperature sensor; and applying a preheat recipe to heat the wafer support plate based at least in part on the temperature of the wafer support plate. In one example implementation, a preheat process can include obtaining one or more temperature measurements from a temperature sensor having a field of view of a wafer support plate in a millisecond anneal system; and applying a pulsed preheat recipe to heat the wafer support plate in the millisecond anneal system based at least in part on the one or more temperature measurements.

Abstract: A generator for a power plant and a method for cooling the generator, where the generator includes a stator and a rotor, the stator carrying conductors. The conductors for a winding overhang at least at one end of the stator and the generator has a fan for cooling the winding overhang. The fan produces a cooling air flow directed onto the winding overhang and has an axial component and a radial component.

Abstract: Preheat processes for a millisecond anneal system are provided. In one example implementation, a preheat process can include receiving a substrate on a wafer support plate in a processing chamber of a millisecond anneal system; obtaining one or more temperature measurements of the wafer support plate using a temperature sensor; and applying a preheat recipe to heat the wafer support plate based at least in part on the temperature of the wafer support plate. In one example implementation, a preheat process can include obtaining one or more temperature measurements from a temperature sensor having a field of view of a wafer support plate in a millisecond anneal system; and applying a pulsed preheat recipe to heat the wafer support plate in the millisecond anneal system based at least in part on the one or more temperature measurements.

Abstract: Systems and methods for improving process uniformity in a millisecond anneal system are provided. In some implementations, a process for thermally treating a substrate in a millisecond anneal system can include obtaining data indicative of a temperature profile associated with one or more substrates during processing in a millisecond anneal system. The process can include one or more of (1) changing the pressure inside the processing chamber of the millisecond anneal system; (2) manipulating the irradiation distribution by way of the refracting effect of a water window in the millisecond anneal system; (3) adjusting the angular positioning of the substrate; and/or (4) configuring the shape of the reflectors used in the millisecond anneal system.

Abstract: A conveying device for a mixture of free-flowing finely divided solid materials, in particular for powdered and/or granular (mixed) material, especially polymer granules with a liquid includes a telescopic pipe which is vertically arranged and can be flexibly fitted for conveying a mixture of preferably polymer granules with a liquid, for example for flushing a contaminated conveying device.

Abstract: A conveying device for free-flowing fine-particle solids, in particular for powdery and/or granular (mixed) material, especially plastic granulate, includes a vertically arranged and flexibly mountable telescopic pipe for the conveyance of, preferably, polymer granulates, for example in a plant for the filling of polymer granulates.

Abstract: A mixing silo for free-flowing finely divided solid materials, in particular for powdered, fibrous and/or granular mixed material, especially polymer granules, specifically suited for mixing polymer granules, having an excellent mixing quality and at the same time a simplified and improved suitability for washing out in order to avoid cross contamination. The mixing silo may be used for homogenizing possibly inhomogeneous polymer granule batches in the form of a stream of product from a process producing polymer granules.

Abstract: A mobile classifier (deduster) has docking devices, flushing devices and control for the dedusting of granules, in particular polymer granules, with preference polycarbonate granules. The mobile classifier can be set up at different locations underneath silos. To perform its function, the mobile classifier is technically connected to stationary pipelines, filters and fans.

Abstract: A conveying device for free-flowing fine-particle solids (bulk material), in particular for powdery and/or granular (mixed) material, especially plastic granulate, includes a vertically arranged and flexibly mountable pipe for the conveyance of, preferably, polymer granulates, for example in a plant for the filling of polymer granulates. The transport pipe may be included on a mobile work platform.

Abstract: A mobile star wheel feeder includes docking devices, flushing devices and control for the pneumatic conveyance of granules, in particular polymer granules, with preference polycarbonate granules. The mobile star wheel feeder, together with partially mobile sections of pipeline, can be set up at different locations underneath silos.

Abstract: A conveying device for free-flowing fine-particle solids, in particular for powdery and/or granular (mixed) material, especially plastic granulate, includes a vertically arranged and flexibly mountable telescopic pipe for the conveyance of, preferably, polymer granulates, for example in a plant for the filling of polymer granulates.

Abstract: A conveying device for free-flowing fine-particle solids (bulk material), in particular for powdery and/or granular (mixed) material, especially plastic granulate, includes a vertically arranged and flexibly mountable pipe for the conveyance of, preferably, polymer granulates, for example in a plant for the filling of polymer granulates. The transport pipe may be included on a mobile work platform.

Abstract: A conveying device for a mixture of free-flowing finely divided solid materials, in particular for powdered and/or granular (mixed) material, especially polymer granules with a liquid includes a telescopic pipe which is vertically arranged and can be flexibly fitted for conveying a mixture of preferably polymer granules with a liquid, for example for flushing a contaminated conveying device.

Abstract: A mobile classifier (deduster) has docking devices, flushing devices and control for the dedusting of granules, in particular polymer granules, with preference polycarbonate granules. The mobile classifier can be set up at different locations underneath silos. To perform its function, the mobile classifier is technically connected to stationary pipelines, filters and fans.

Abstract: A mixing silo for free-flowing finely divided solid materials, in particular for powdered, fibrous and/or granular mixed material, especially polymer granules, specifically suited for mixing polymer granules, having an excellent mixing quality and at the same time a simplified and improved suitability for washing out in order to avoid cross contamination. The mixing silo may be used for homogenizing possibly inhomogeneous polymer granule batches in the form of a stream of product from a process producing polymer granules.