Patents by Inventor Markus Henry
Markus Henry has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20160290343Abstract: A rotor device for a vacuum pump comprises a rotor shaft and at least one rotor element on the rotor shaft. The rotor element contains aluminum, titanium and/or CFRP, while the rotor shaft contains a chromium-nickel steel. This makes it in particular possible to join the at least one rotor element to the rotor shaft at room temperature using a pressing process.Type: ApplicationFiled: November 5, 2014Publication date: October 6, 2016Inventors: Markus Henry, Juergen Brezina, Robert Stolle, Peter Koeppel
-
Patent number: 8992162Abstract: A multi-inlet vacuum pump has a first pump device (10) and a second pump device (12). The first pump device (10) includes a first rotor element (18) having a plurality of first rotor discs (20, 21) arranged consecutively in the delivery direction (36). The second rotor disc includes a second rotor element (26) having a plurality of second rotor discs (28) arranged consecutively in the delivery direction (36). A first fluid flow (34) is suctioned through a main inlet (32) by the first pump device (10) and delivered in the direction of the second pump device (12). A second fluid flow (40) is suctioned through an intermediate inlet (38) by the second pump device and delivered in the direction of a pump outlet. The diameter of the last rotor disc (21) of the first pump (10) substantially corresponds to the diameter of the first rotor (28) of the second pump device (12).Type: GrantFiled: March 3, 2010Date of Patent: March 31, 2015Assignee: Oerlikon Leybold Vacuum GmbHInventors: Markus Henry, Heinz Englaender, Christian Beyer
-
Patent number: 8926266Abstract: A multi-inlet vacuum pump includes a first pump device (10) including a first rotor element (18) with a plurality of first rotor disks (20) serially arranged in the conveying direction (36), and a second pump device (12) including a further rotor element (26) with a plurality of second rotor disks (28) serially arranged in the conveying direction (36). A diameter of the second rotor disks (28) is at least partially larger than a diameter of the first rotor disks (20). A main inlet (32) sucks in a first fluid stream (34) with the first pump device (10). The first fluid stream (34) is conveyed in the direction of the further pump device (12). An intermediate inlet (38) sucks in a second fluid stream (40) with the second pump device (12). The second fluid stream (40) is conveyed in the direction of a pump outlet. A process of merging the two fluid streams (34,40) will occur within the second pump device (12), preferably between two adjacent second rotor disks (28) of the second pump device (12).Type: GrantFiled: February 23, 2010Date of Patent: January 6, 2015Assignee: Oerlikon Leybold Vacuum GmbHInventors: Christian Beyer, Markus Henry, Heinz Englaender
-
Patent number: 8790070Abstract: A stator-rotor arrangement for a vacuum pump, in particular for a turbomolecular pump, includes a plurality of stator disks (18) that cooperate with a rotor element (14). The stator disks (18) are disposed between rotor disks (16). The stator disks (18) are held by way of stator rings (20, 22). At least two of the stator rings (20) include protrusions (24) that are connected together by way of holding elements (28, 30). This makes pre-installation of the rotor-stator arrangement (12) or placement of the rotor-stator arrangement (12) in a housing (10) possible. The protrusions (24) are disposed in the area of corners (32) of the housing (10).Type: GrantFiled: August 25, 2009Date of Patent: July 29, 2014Assignee: Oerlikon Leybold Vacuum GmbHInventors: Peter Klingner, Markus Henry
-
Publication number: 20120087776Abstract: A multi-inlet vacuum pump has a first pump device (10) and a second pump device (12). The first pump device (10) includes a first rotor element (18) having a plurality of first rotor discs (20, 21) arranged consecutively in the delivery direction (36). The second rotor disc includes a second rotor element (26) having a plurality of second rotor discs (28) arranged consecutively in the delivery direction (36). A first fluid flow (34) is suctioned through a main inlet (32) by the first pump device (10) and delivered in the direction of the second pump device (12). A second fluid flow (40) is suctioned through an intermediate inlet (38) by the second pump device and delivered in the direction of a pump outlet. The diameter of the last rotor disc (21) of the first pump (10) substantially corresponds to the diameter of the first rotor (28) of the second pump device (12).Type: ApplicationFiled: March 3, 2010Publication date: April 12, 2012Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Markus Henry, Heinz Englaender, Christian Beyer
-
Patent number: 8106354Abstract: The invention refers to a mass spectrometer arrangement (10) comprising a housing (86) having a mass spectrometer forevacuum vacuum chamber (20) with a mass spectrometer forevacuum outlet (30), at least two mass spectrometer high-vacuum vacuum chambers (21, 22, 23), and an integrated turbomolecular pump (12) connected with the high-vacuum vacuum chambers (21, 22, 23) and having a forevacuum outlet (89). The two forevacuum outlets (30, 89) open into a common forevacuum chamber (98) in the housing (86), which in turn opens into a housing outlet (88).Type: GrantFiled: June 3, 2008Date of Patent: January 31, 2012Assignee: Oerlikon Leybold Vacuum GmbHInventors: Markus Henry, Christian Beyer
-
Publication number: 20110311348Abstract: A multi-inlet vacuum pump includes a first pump device (10) including a first rotor element (18) with a plurality of first rotor disks (20) serially arranged in the conveying direction (36), and a second pump device (12) including a further rotor element (26) with a plurality of second rotor disks (28) serially arranged in the conveying direction (36). A diameter of the second rotor disks (28) is at least partially larger than a diameter of the first rotor disks (20). A main inlet (32) sucks in a first fluid stream (34) with the first pump device (10). The first fluid stream (34) is conveyed in the direction of the further pump device (12). An intermediate inlet (38) sucks in a second fluid stream (40) with the second pump device (12). The second fluid stream (40) is conveyed in the direction of a pump outlet. A process of merging the two fluid streams (34,40) will occur within the second pump device (12), preferably between two adjacent second rotor disks (28) of the second pump device (12).Type: ApplicationFiled: February 23, 2010Publication date: December 22, 2011Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Christian Beyer, Markus Henry, Heinz Englaender
-
USE OF A ROLLING-ELEMENT BEARING FOR BEARING ROTATING COMPONENTS IN VACUUM DEVICES AND VACUUM DEVICE
Publication number: 20110255999Abstract: A rolling-element bearing for bearing rotating components in vacuum devices includes a plurality of rolling elements (10) arranged between bearing elements (12, 14). A bearing compartment (26) is for example closed by sealing elements (22, 24) on both sides. The sealing elements (22, 24) have a minor sealing gap(s). The rolling-elements bearing is used in vacuum sections in which a pressure of less than 10?3 mbar prevails.Type: ApplicationFiled: July 17, 2009Publication date: October 20, 2011Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Ralf Adamietz, Petra Adamietz, Rainer Hoelzer, Markus Henry -
Publication number: 20110150629Abstract: A stator-rotor arrangement for a vacuum pump, in particular for a turbomolecular pump, includes a plurality of stator disks (18) that cooperate with a rotor element (14). The stator disks (18) are disposed between rotor disks (16). The stator disks (18) are held by way of stator rings (20, 22). At least two of the stator rings (20) include protrusions (24) that are connected together by way of holding elements (28, 30). This makes pre-installation of the rotor-stator arrangement (12) or placement of the rotor-stator arrangement (12) in a housing (10) possible. The protrusions (24) are disposed in the area of corners (32) of the housing (10).Type: ApplicationFiled: August 25, 2009Publication date: June 23, 2011Applicant: OERLIKON LEYBOLD VACUUM GmbHInventors: Peter Klingner, Markus Henry
-
Publication number: 20110135506Abstract: A multi-stage vacuum pump includes a plurality of rotor elements (14, 16) disposed on a common shaft (10) in a pump housing (12) for configuring multiple pump stages (18, 24, 26). The shaft is driven by an electric motor (40). An inner bearing element (42) is disposed between two rotor elements (14, 16) such that a mechanically favorable bearing arrangement is implemented using a simple configuration of the bearing elements (42, 44) as roller bearings. This is possible in particular due to the separation into two rotor elements (14, 16).Type: ApplicationFiled: May 5, 2009Publication date: June 9, 2011Applicant: OBERLIKON LEYBOLD VACUUM GmbHInventors: Markus Henry, Peter Klingner
-
Publication number: 20110123328Abstract: A vacuum pump, particularly a turbomolecular pump or multi-inlet pump, comprises a rotor shaft (12) carrying at least one rotor means (14). The rotor shaft (12) is supported on the pressure side by a bearing assembly (56) and on the suction-side by a further bearing assembly (30). According to the invention, the suction-side bearing assembly (30) comprises an electromagnetic bearing (32,34). Further according to the invention, the pressure-side bearing assembly (56) comprises a ball bearing (58) so that the rotor shaft (12) can be given the largest possible length. The rolling bearing (58) is preferably biased by the electromagnetic bearing (32,34).Type: ApplicationFiled: November 23, 2010Publication date: May 26, 2011Applicant: OERLIKON LEYBOLD VACUUM GmbHInventors: Markus Henry, Christian Beyer, Heinz Englaender, Rainer Hoelzer, Heinz-Dieter Odendahl
-
Publication number: 20110081231Abstract: A pump bearing arrangement, suitable particularly for rapidly rotating pumps such as turbomolecular pumps, comprises a pump rotor (10) con-nected to a rotor shaft. The rotor shaft (14) is supported in a shaft housing (20) by two bearing arrangements (12). Each bearing arrangement (12) has an inner bearing ring (16) connected to the rotor shaft (14) and an outer bearing ring (22) connected to the shaft housing (20). Bearing supports (24) are disposed between the two bearing rings. At least one vibration element (26) is provided between the outer bearing ring (22) and the shaft housing (20), serving for damping and further having a thermal conductivity of at least 0.3 W/mK for dissipating heat.Type: ApplicationFiled: July 22, 2008Publication date: April 7, 2011Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Rainer Hoelzer, Markus Henry, Robert Stolle
-
Publication number: 20100187415Abstract: A turbomolecular pump (12) has a circular intake opening (16) distal of an inlet rotor stage (18). The intake opening (16) comprises at least two opening sections (41, 42, 43) that are separated from each other.Type: ApplicationFiled: June 5, 2008Publication date: July 29, 2010Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Robert Schneiders, Markus Henry, Gerhard Wilhelm Walter
-
Publication number: 20100176294Abstract: The invention refers to a mass spectrometer arrangement (10) comprising a housing (86) having a mass spectrometer forevacuum vacuum chamber (20) with a mass spectrometer forevacuum outlet (30), at least two mass spectrometer high-vacuum vacuum chambers (21, 22, 23), and an integrated turbomolecular pump (12) connected with the high-vacuum vacuum chambers (21, 22, 23) and having a forevacuum outlet (89). The two forevacuum outlets (30, 89) open into a common forevacuum chamber (98) in the housing (86), which in turn opens into a housing outlet (88).Type: ApplicationFiled: June 3, 2008Publication date: July 15, 2010Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Markus Henry, Christian Beyer
-
Patent number: 6435811Abstract: The invention relates to a friction vacuum pump (1) with a stator (3) and a rotor (4), which form at least two pump stages (12, 13, 14) with one gas inlet (23, 28) each, as well as with junction for the pump stages, which are equipped with junction openings (36,37) and serve for the connection of the gas inlets (23, 28) of the pump stages with devices to be evacuated; in order to avoid high conductance losses it is proposed that the junction openings (36, 37) are located in a plane which is disposed laterally adjacent to the pump stages (12, 13, 14) such that the distance between the junction openings (36, 37) and the rotor axis (15) is of minimum feasible size.Type: GrantFiled: November 8, 2000Date of Patent: August 20, 2002Assignee: Leybold Vakuum GmbHInventors: Christian Beyer, Ralf Adamietz, Markus Henry, Gunter Schutz, Heinrich Engländer, Gerhard Wilhelm Walter, Hans-Rudolf Fischer