Patents by Inventor Markus Schwerd

Markus Schwerd has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9269669
    Abstract: A multifunctional dielectric layer can be formed on a substrate, especially on an exposed metallic strip conductor system on a substrate. An additional metal layer is formed across the surface of the exposed metal strip conductors. The metal layer is then at least partially converted to a nonconducting metal oxide, the dielectric layer.
    Type: Grant
    Filed: February 23, 2012
    Date of Patent: February 23, 2016
    Assignee: Infineon Technologies AG
    Inventors: Johann Helneder, Markus Schwerd, Thomas Goebel, Andrea Mitchell, Heinrich Koerner, Martina Hommel
  • Patent number: 8367514
    Abstract: An integrated circuit and fabrication method are presented. The integrated circuit includes a capacitor containing a base electrode, a covering electrode, and a dielectric between the base and covering electrodes. The dielectric contains an oxide of a material contained in the base electrode, which may be produced by anodic oxidation. A peripheral edge of the dielectric is uncovered by the covering electrode. A base layer on the capacitor includes a cutout adjacent to the dielectric. During fabrication, the base layer protects the material of the base electrode that is to be anodically oxidized from chemicals, and also protects the surrounding regions from anodic oxidation. A precision resistor may be fabricated simultaneously with the capacitor.
    Type: Grant
    Filed: January 29, 2010
    Date of Patent: February 5, 2013
    Assignee: Infineon Technologies AG
    Inventors: Thomas Goebel, Johann Helneder, Heinrich Körner, Andrea Mitchell, Markus Schwerd, Martin Seck, Holger Torwesten
  • Patent number: 8258628
    Abstract: An integrated circuit arrangement includes a substrate with a multiplicity of integrated semiconductor components arranged therein, the substrate having a wiring interconnect near to the substrate, a middle wiring interconnect and a wiring interconnect remote from the substrate, which are arranged in this order at increasing distance from the substrate.
    Type: Grant
    Filed: September 20, 2006
    Date of Patent: September 4, 2012
    Assignee: Infineon Technologies AG
    Inventors: Martina Hommel, Heinrich Koerner, Markus Schwerd, Martin Seck
  • Publication number: 20120149168
    Abstract: A multifunctional dielectric layer can be formed on a substrate, especially on an exposed metallic strip conductor system on a substrate. An additional metal layer is formed across the surface of the exposed metal strip conductors. The metal layer is then at least partially converted to a nonconducting metal oxide, the dielectric layer.
    Type: Application
    Filed: February 23, 2012
    Publication date: June 14, 2012
    Inventors: Johann Helneder, Markus Schwerd, Thomas Goebel, Andrea Mitchell, Heinrich Koerner, Martina Hommel
  • Patent number: 7964494
    Abstract: A connection arrangement having an outer conductive structure arranged at least partly or completely in a cutout of an electrical insulation layer is provided. An inner conductive structure is arranged at the bottom of the cutout on one side of the insulation layer. The inner conductive structure adjoins the outer conductive structure in a contact zone. A contact area is arranged at the outer conductive structure on the other side of the cutout. The contact zone and the contact area do not overlap. The bottom of the cutout is arranged to overlaps at least half of the contact area, to provide a step in the insulation layer at the edge of the cutout outside a main current path between the contact area and the inner conductive structure.
    Type: Grant
    Filed: September 18, 2009
    Date of Patent: June 21, 2011
    Assignee: Infineon Technologies AG
    Inventors: Stefan Drexl, Thomas Goebel, Johann Helneder, Martina Hommel, Wolfgang Klein, Heinrich Körner, Andrea Mitchell, Markus Schwerd, Martin Seck
  • Publication number: 20100129977
    Abstract: An integrated circuit and fabrication method are presented. The integrated circuit includes a capacitor containing a base electrode, a covering electrode, and a dielectric between the base and covering electrodes. The dielectric contains an oxide of a material contained in the base electrode, which may be produced by anodic oxidation. A peripheral edge of the dielectric is uncovered by the covering electrode. A base layer on the capacitor includes a cutout adjacent to the dielectric. During fabrication, the base layer protects the material of the base electrode that is to be anodically oxidized from chemicals, and also protects the surrounding regions from anodic oxidation. A precision resistor may be fabricated simultaneously with the capacitor.
    Type: Application
    Filed: January 29, 2010
    Publication date: May 27, 2010
    Inventors: Thomas Goebel, Johann Helneder, Heinrich Körner, Andrea Mitchell, Markus Schwerd, Martin Seck, Holger Torwesten
  • Patent number: 7692266
    Abstract: An integrated circuit and fabrication method are presented. The integrated circuit includes a capacitor containing a base electrode, a covering electrode, and a dielectric between the base and covering electrodes. The dielectric contains an oxide of a material contained in the base electrode, which may be produced by anodic oxidation. A peripheral edge of the dielectric is uncovered by the covering electrode. A base layer on the capacitor includes a cutout adjacent to the dielectric. During fabrication, the base layer protects the material of the base electrode that is to be anodically oxidized from chemicals, and also protects the surrounding regions from anodic oxidation. A precision resistor may be fabricated simultaneously with the capacitor.
    Type: Grant
    Filed: March 3, 2006
    Date of Patent: April 6, 2010
    Assignee: Infineon Technologies A.G.
    Inventors: Thomas Goebel, Johann Helneder, Heinrich Körner, Andrea Mitchell, Markus Schwerd, Martin Seck, Holger Torwesten
  • Patent number: 7667256
    Abstract: An integrated circuit arrangement is disclosed. In one embodiment, the integrated circuit arrangement includes at least three conductive structure levels in which in each case elongated interconnects are arranged.
    Type: Grant
    Filed: September 21, 2006
    Date of Patent: February 23, 2010
    Assignee: Infineon Technologies AG
    Inventors: Martina Hommel, Heinrich Koerner, Markus Schwerd, Martin Seck
  • Patent number: 7656037
    Abstract: An integrated circuit arrangement is disclosed. In one embodiment, the integrated circuit arrangement includes at least three conductive structures levels and elongated interconnects.
    Type: Grant
    Filed: September 21, 2006
    Date of Patent: February 2, 2010
    Assignee: Infineon Technologies AG
    Inventors: Martina Hommel, Heinrich Koerner, Markus Schwerd, Martin Seck
  • Publication number: 20100007027
    Abstract: A connection arrangement having an outer conductive structure arranged at least partly or completely in a cutout of an electrical insulation layer is provided. An inner conductive structure is arranged at the bottom of the cutout on one side of the insulation layer. The inner conductive structure adjoins the outer conductive structure in a contact zone. A contact area is arranged at the outer conductive structure on the other side of the cutout. The contact zone and the contact area do not overlap. The bottom of the cutout is arranged to overlaps at least half of the contact area, to provide a step in the insulation layer at the edge of the cutout outside a main current path between the contact area and the inner conductive structure.
    Type: Application
    Filed: September 18, 2009
    Publication date: January 14, 2010
    Inventors: Stephen Drexl, Thomas Goebel, Johann Helneder, Martina Hommel, Wolfgang Klein, Heinrich Körner, Andrea Mitchell, Markus Schwerd, Martin Seck
  • Patent number: 7619309
    Abstract: A connection arrangement having an outer conductive structure arranged at least partly or completely in a cutout of an electrical insulation layer is provided. An inner conductive structure is arranged at the bottom of the cutout on one side of the insulation layer. The inner conductive structure adjoins the outer conductive structure in a contact zone. A contact area is arranged at the outer conductive structure on the other side of the cutout. The contact zone and the contact area do not overlap. The bottom of the cutout is arranged to overlaps at least half of the contact area, to provide a step in the insulation layer at the edge of the cutout outside a main current path between the contact area and the inner conductive structure.
    Type: Grant
    Filed: February 9, 2006
    Date of Patent: November 17, 2009
    Assignee: Infineon Technologies AG
    Inventors: Stefan Drexl, Thomas Goebel, Johann Helneder, Martina Hommel, Wolfgang Klein, Heinrich Kôrner, Andrea Mitchell, Markus Schwerd, Martin Seck
  • Publication number: 20080224318
    Abstract: An integrated circuit arrangement includes a substrate with a multiplicity of integrated semiconductor components arranged therein, the substrate having a wiring interconnect near to the substrate, a middle wiring interconnect and a wiring interconnect remote from the substrate, which are arranged in this order at increasing distance from the substrate.
    Type: Application
    Filed: September 20, 2006
    Publication date: September 18, 2008
    Inventors: Martina Hommel, Heinrich Koerner, Markus Schwerd, Martin Seck
  • Publication number: 20070071053
    Abstract: An integrated circuit arrangement is disclosed. In one embodiment, the integrated circuit arrangement includes at least three conductive structures levels and elongated interconnects.
    Type: Application
    Filed: September 21, 2006
    Publication date: March 29, 2007
    Inventors: Martina Hommel, Heinrich Koerner, Markus Schwerd, Martin Seck
  • Publication number: 20070071052
    Abstract: An integrated circuit arrangement is disclosed. In one embodiment, the integrated circuit arrangement includes at least three conductive structure levels in which in each case elongated interconnects are arranged.
    Type: Application
    Filed: September 21, 2006
    Publication date: March 29, 2007
    Inventors: Martina Hommel, Heinrich Koerner, Markus Schwerd, Martin Seck
  • Publication number: 20060222760
    Abstract: A multifunctional dielectric layer can be formed on a substrate, especially on an exposed metallic strip conductor system on a substrate. An additional metal layer is formed across the surface of the exposed metal strip conductors. The metal layer is then at least partially converted to a nonconducting metal oxide, the dielectric layer.
    Type: Application
    Filed: March 21, 2006
    Publication date: October 5, 2006
    Inventors: Johann Helneder, Markus Schwerd, Thomas Goebel, Andrea Mitchell, Heinrich Koerner, Martina Hommel
  • Publication number: 20060214265
    Abstract: An integrated circuit and fabrication method are presented. The integrated circuit includes a capacitor containing a base electrode, a covering electrode, and a dielectric between the base and covering electrodes. The dielectric contains an oxide of a material contained in the base electrode, which may be produced by anodic oxidation. A peripheral edge of the dielectric is uncovered by the covering electrode. A base layer on the capacitor includes a cutout adjacent to the dielectric. During fabrication, the base layer protects the material of the base electrode that is to be anodically oxidized from chemicals, and also protects the surrounding regions from anodic oxidation. A precision resistor may be fabricated simultaneously with the capacitor.
    Type: Application
    Filed: March 3, 2006
    Publication date: September 28, 2006
    Inventors: Thomas Goebel, Johann Helneder, Heinrich Korner, Andrea Mitchell, Markus Schwerd, Martin Seck, Holger Torwesten
  • Publication number: 20060192289
    Abstract: A connection arrangement having an outer conductive structure arranged at least partly or completely in a cutout of an electrical insulation layer is provided. An inner conductive structure is arranged at the bottom of the cutout on one side of the insulation layer. The inner conductive structure adjoins the outer conductive structure in a contact zone. A contact area is arranged at the outer conductive structure on the other side of the cutout. The contact zone and the contact area do not overlap. The bottom of the cutout is arranged to overlaps at least half of the contact area, to provide a step in the insulation layer at the edge of the cutout outside a main current path between the contact area and the inner conductive structure.
    Type: Application
    Filed: February 9, 2006
    Publication date: August 31, 2006
    Inventors: Stefan Drexl, Thomas Goebel, Johann Helneder, Martina Hommel, Wolfgang Klein, Heinrich Korner, Andrea Mitchell, Markus Schwerd, Martin Seck
  • Patent number: 6958509
    Abstract: To fabricate an integrated semiconductor product with integrated metal-insulator-metal capacitor, first of all a dielectric protective layer (5) and a dielectric auxiliary layer (16) are deposited on a first electrode (2). The protective layer and the auxiliary layer (16) are then opened up (17) via the first electrode. Then, a dielectric layer (6) is produced, and the metal track stack (7, 8, 9) for the second electrode is then applied to the dielectric layer (6). This is followed by the patterning of the metal-insulator-metal capacitor using known etching processes. This makes it possible to produce dielectric capacitor layers of any desired thickness using materials which can be selected as desired. In particular, this has the advantage that via etches can be carried out significantly more easily than in the prior art, since it is not necessary to etch through the residual dielectric capacitor layer above the metal tracks.
    Type: Grant
    Filed: June 10, 2004
    Date of Patent: October 25, 2005
    Assignee: Infineon Technologies AG
    Inventors: Heinrich Körner, Michael Schrenk, Markus Schwerd
  • Patent number: 6940720
    Abstract: An integrated circuit includes an electric resistor trace, a substrate and a thermally conductive structure arranged above or below the electric resistor trace for dissipating heat from the electric resistor trace to the substrate. The present invention is based on the finding that by introducing the additional thermally conductive structure, despite the introduction of this additional thermally conductive structure requiring space at first, due to the significantly increased heat conductivity to the substrate, a smaller overall chip area for implementing integrated resistors can be obtained.
    Type: Grant
    Filed: April 25, 2003
    Date of Patent: September 6, 2005
    Assignee: Infineon Technologies AG
    Inventors: Armin Fischer, Johann Helneder, Heinrich Körner, Markus Schwerd, Wolfgang Walter, Alexander Von Glasow
  • Publication number: 20040256654
    Abstract: To fabricate an integrated semiconductor product with integrated metal-insulator-metal capacitor, first of all a dielectric protective layer (5) and a dielectric auxiliary layer (16) are deposited on a first electrode (2). The protective layer and the auxiliary layer (16) are then opened up (17) via the first electrode. Then, a dielectric layer (6) is produced, and the metal track stack (7, 8, 9) for the second electrode is then applied to the dielectric layer (6). This is followed by the patterning of the metal-insulator-metal capacitor using known etching processes. This makes it possible to produce dielectric capacitor layers of any desired thickness using materials which can be selected as desired. In particular, this has the advantage that via etches can be carried out significantly more easily than in the prior art, since it is not necessary to etch through the residual dielectric capacitor layer above the metal tracks.
    Type: Application
    Filed: June 10, 2004
    Publication date: December 23, 2004
    Applicant: Infineon Technologies AG
    Inventors: Heinrich Korner, Michael Schrenk, Markus Schwerd