Patents by Inventor Marsden P. Griswold

Marsden P. Griswold has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and method for the alignment of masks
    Patent number: 5160959
    Abstract: A device for aligning a flexible mask with a substrate when the substrate is mounted on a vacuum chuck member which includes a surround member surrounding the exposed surface of the substrate. The mask is held on a mask holder and the chuck member and mask holder are movable toward and away from each other. The surround member rests on a flexible element which effectively causes the surround member to float so that when the mask is brought into contact with the substrate, the mask always lies in the same plane as the exposed surface of the substrate and the exposed surface of the surround member and no distortion of the mask occurs.
    Type: Grant
    Filed: December 9, 1991
    Date of Patent: November 3, 1992
    Assignee: Massachusetts Institute of Technology
    Inventors: Patrick N. Everett, William F. Delaney, Marsden P. Griswold