Abstract: A generic interface between an electronic commerce frontend and a business management backend is provided via an object oriented computer program product. In operation, the program creates one or more specific business objects from a plurality of specific business object classes. The program also provides a framework within which the business objects travel. A first framework instance is coupled to the frontend, and a second framework instance is coupled to the backend. In response to a request from the frontend or backend, the framework instance coupled to the requesting end creates a specific business object to perform the requested operation. Specific Business Objects are derived from a common class containing the methods required by the framework, a specific business object class containing the methods for performing a specific business function (e.g., order, provide production information, etc.

Abstract: A method of monitoring the status of plasma in a chamber using real-time spectral data while conducting an etch process during the course of manufacturing of semiconductor wafers. Spectral data is collected during etching, with the spectral data characterizing an emission of light from etch species contained in the plasma, and maintaining the collected data as reference data. A model of principal components of the data is generated. Additional spectral data is extracted from the plasma and compared with the model. Discrepancies pinpoint the presence of foreign material faults and help determine the cause of the failures to ensure appropriate corrective action.