Patents by Inventor Martin E. McBRIARTY

Martin E. McBRIARTY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thin film deposition in a high aspect ratio feature
    Patent number: 11139186
    Abstract: Techniques for creating a high aspect feature and testing the efficacy of a gas-phase deposition process are provided. An example of a method for thin film deposition in a high aspect ratio feature includes preparing a first substrate for a material deposition process, depositing a plurality of spacers on a top surface of the first substrate, disposing a bottom surface of a second substrate on the plurality of spacers, and performing a gas-phase material deposition on the first substrate and the second substrate.
    Type: Grant
    Filed: December 16, 2019
    Date of Patent: October 5, 2021
    Assignee: INTERMOLECULAR, INC.
    Inventors: Martin E. McBriarty, Karl A. Littau
  • THIN FILM DEPOSITION IN A HIGH ASPECT RATIO FEATURE
    Publication number: 20210183674
    Abstract: Techniques for creating a high aspect feature and testing the efficacy of a gas-phase deposition process are provided. An example of a method for thin film deposition in a high aspect ratio feature includes preparing a first substrate for a material deposition process, depositing a plurality of spacers on a top surface of the first substrate, disposing a bottom surface of a second substrate on the plurality of spacers, and performing a gas-phase material deposition on the first substrate and the second substrate.
    Type: Application
    Filed: December 16, 2019
    Publication date: June 17, 2021
    Inventors: Martin E. McBRIARTY, Karl A. LITTAU