Patents by Inventor Martin M. Liphardt

Martin M. Liphardt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9952141
    Abstract: An approach to characterizing beams of electromagnetic radiation such as are applied in ellipsometer and the like systems, involving considering the beam to be comprised of a number of spatially distributed beam rays, each of which is represented mathematically as an effectively independent source.
    Type: Grant
    Filed: June 22, 2016
    Date of Patent: April 24, 2018
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Jeffrey S. Hale, Craig M. Herzinger, Martin M. Liphardt
  • Patent number: 9933357
    Abstract: An ellipsometer system with polarization state generator and polarization state analyzer components inside at least one internal environment supporting encasement, said at least one encasement being present inside said environmental chamber.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: April 3, 2018
    Assignee: J. A. WOOLLAM CO., INC.
    Inventors: Ping He, Gregory K. Pribil, Martin M. Liphardt
  • Patent number: 9921395
    Abstract: A reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved. This invention is also a combination of a focusing element and a filtering element that provides an optimum electromagnetic beam cross-sectional area based on optimizing the beam cross-sectional area in view of conflicting effects of aberration and diffraction inherent in said focusing element, which, for each wavelength, vary oppositely to one another with electromagnetic beam cross-sectional area.
    Type: Grant
    Filed: November 18, 2016
    Date of Patent: March 20, 2018
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Patent number: 9658151
    Abstract: In the context of an ellipsometer or the like, positioning a camera other than directly above a sample being investigated by an electromagnetic beam, while said camera provides an optical view of a surface of said sample which is in focus over the entire viewed extent of the sample, and wherein a contrast improving system involving two beams provided by a beam splitting system is utilized.
    Type: Grant
    Filed: February 6, 2015
    Date of Patent: May 23, 2017
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Galen L. Pfeiffer
  • Patent number: 9546943
    Abstract: A system for and method of investigating changes in optical properties of a porous effective substrate surface related to, for instance, effective surface depth and refractive index, pore size, pore volume and pore size distribution at atmospheric pressure.
    Type: Grant
    Filed: March 18, 2016
    Date of Patent: January 17, 2017
    Assignee: J.A. WOOLLAM CO., INC
    Inventors: Jeremy A. Vanderslice, Christopher A. Goeden, Martin M. Liphardt
  • Publication number: 20160356998
    Abstract: A method of calibrating a reflective focusing optics to provide a system that minimizes the effect of multiple beam reflections therewithin on polarization state reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
    Type: Application
    Filed: August 8, 2016
    Publication date: December 8, 2016
    Applicant: J.A. WOOLLAM CO., INC
    Inventors: MARTIN M. LIPHARDT, JEFFREY S. HALE, PING HE, GALEN L. PFEIFFER
  • Patent number: 9500843
    Abstract: A method of calibrating a reflective focusing optics to provide a system that minimizes the effect of multiple beam reflections therewithin on polarization state reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
    Type: Grant
    Filed: August 8, 2016
    Date of Patent: November 22, 2016
    Assignee: J.A. WOOLLAM CO., INC
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Patent number: 9442016
    Abstract: A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
    Type: Grant
    Filed: November 4, 2014
    Date of Patent: September 13, 2016
    Assignee: J.A. WOOLLAM CO., INC
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Patent number: 9360369
    Abstract: A system for easily determining average ellipsometric parameters based on data obtained from two different locations on a planar or non-planar shaped object, along with its method of use.
    Type: Grant
    Filed: June 20, 2015
    Date of Patent: June 7, 2016
    Assignee: J.A. WOOLLAM CO., INC
    Inventors: Galen L. Pfeiffer, Martin M. Liphardt
  • Patent number: 9347768
    Abstract: A system for monitoring, in real time, relatively large samples as they are caused to pass by an ellipsometer or the like system, and method of its use.
    Type: Grant
    Filed: March 6, 2012
    Date of Patent: May 24, 2016
    Assignee: J.A. WOOLLAM CO., INC
    Inventors: Galen L. Pfeiffer, Blaine D. Johs, Brian D. Guenther, Martin M. Liphardt, Jeffrey S. Hale
  • Publication number: 20150355029
    Abstract: A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
    Type: Application
    Filed: November 4, 2014
    Publication date: December 10, 2015
    Applicant: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Publication number: 20150185136
    Abstract: In the context of an ellipsometer or the like, positioning a camera other than directly above a sample being investigated by an electromagnetic beam, while said camera provides an optical view of a surface of said sample which is in focus over the entire viewed extent of the sample, and wherein a contrast improving system involving two beams provided by a beam splitting system is utilized.
    Type: Application
    Filed: February 6, 2015
    Publication date: July 2, 2015
    Applicant: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Galen L. Pfeiffer
  • Publication number: 20150153230
    Abstract: A dual scanning and FTIR system for application in the Terahertz and broadband blackbody frequency range including sources for providing Thz and broadband blackbody range and electromagnetic radiation, at least one detector of electromagnetic radiation in the THZ and broadband blackbody ranges, and at least one rotating element between the source and detector.
    Type: Application
    Filed: March 7, 2013
    Publication date: June 4, 2015
    Applicants: REGENTS OF THE UNIVERSITY OF NEBRASKA (50%), J.A.WOLLAM CO. (50%)
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Patent number: 9041927
    Abstract: A dual scanning and FTIR system for application in the Terahertz and broadband blackbody frequency range including sources for providing Thz and broadband blackbody range and electromagnetic radiation, at least one detector of electromagnetic radiation in the THZ and broadband blackbody ranges, and at least one rotating element between the source and detector.
    Type: Grant
    Filed: March 7, 2013
    Date of Patent: May 26, 2015
    Assignees: J.A. WOOLLAM CO., INC, BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Patent number: 8983787
    Abstract: Methodology for determining uncertainty in a data set which characterizes a sample involving elimination of the influence of sample alteration drift caused by data set acquisition, and/or elimination of the influence of system drift during data acquisition.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: March 17, 2015
    Inventor: Martin M. Liphardt
  • Patent number: 8953030
    Abstract: In the context of an ellipsometer or the like, positioning a camera other than directly above a sample being investigated by an electromagnetic beam, while said camera provides an optical view of a surface of said sample which is in focus over the entire viewed extent of the sample.
    Type: Grant
    Filed: March 6, 2012
    Date of Patent: February 10, 2015
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Galen L. Pfeiffer
  • Patent number: 8934096
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.
    Type: Grant
    Filed: May 11, 2012
    Date of Patent: January 13, 2015
    Assignees: University of Nebraska Board of Regents, J.A. Woollam Co., Inc.
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Patent number: 8749782
    Abstract: Computer driven systems and methods involving at least one electromagnetic beam focuser and digital light processor that in combination serve to position selected wavelengths in a spectroscopic electromagnetic beam onto a small spot on a sample, and direct the one or more selected wavelengths reflected by the sample into, while diverting other wavelengths away from, a detector.
    Type: Grant
    Filed: August 25, 2011
    Date of Patent: June 10, 2014
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Galen L. Pfeiffer
  • Patent number: 8749785
    Abstract: A combination of a focusing element, and a filtering element which naturally adjusts the cross-sectional area of a beam of electromagnetic radiation passed through the focusing element as a function of wavelength, optionally as an element of an ellipsometer or polarimeter system.
    Type: Grant
    Filed: December 26, 2012
    Date of Patent: June 10, 2014
    Assignee: J.A. Woolam Co., Inc.
    Inventor: Martin M. Liphardt
  • Patent number: 8705032
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including a polarization state generator comprising: an odd bounce image rotating system and a polarizer, or two polarizers; and optionally including least one compensator and/or modulator, in addition to an analyzer.
    Type: Grant
    Filed: March 7, 2013
    Date of Patent: April 22, 2014
    Assignee: J.A. Woollam Co., Inc
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam