Abstract: A valve on which a valve plate is arranged in a valve housing interior space of a valve housing and fixed to a shaft, in which the valve plate together with the shaft can be displaced back and forth in directions parallel to a shaft longitudinal axis between a closed position and an intermediate position, and by rotation of the shaft about the shaft longitudinal axis can be pivoted back and forth between the intermediate position and a maximum open position. A shaft leadthrough for sealing the shaft with respect to the valve housing has a bellows which can be expanded and pushed together in the directions parallel to the shaft longitudinal axis, a first bellows end of this bellows being fixed to the valve housing, and a shaft sealing ring in which the shaft is rotatably mounted, being arranged on a second bellows end.

Abstract: A seal support ring (1) for a valve (2), particularly a vacuum valve, which has a throughflow opening (3) and a basic body (4), which annularly surrounds the throughflow opening, and a fastener arrangement (5) for fastening the seal support ring to a valve housing (6) of the valve. The basic body has a first side (7) on which the seal support ring, in a mounted state on the valve housing, lies against the valve housing, and the seal support ring has a seal ring (8) made from an elastomer which, in its position on the basic body, surrounds the throughflow opening. A casing wall (9) is arranged on the basic body and at least partially surrounds the throughflow opening and, on a second side (10) of the basic body (4) opposite the first side, protrudes from the basic body and has a larger inside diameter than the seal ring.

Abstract: The invention relates to a vacuum valve for substantially gas-tight closure of a first valve opening including a valve seat, a closure element for substantially gas-tight closure of the first valve opening, and a drive unit for providing a movement of the closure element relative to the valve seat. The closure element is designed to be flexible in such a way that a spatial expansion of the closure element in the closed position is variable in a direction parallel to the opening axis as a function of an applied differential pressure.

Abstract: Disclosed is a vacuum valve system for a vacuum transport system, including a valve seat assembly having a first valve opening defining an opening axis and a first sealing surface surrounding the first valve opening; a closure component for closing of the first valve opening with a second sealing surface corresponding to the first sealing surface; and a drive unit for the closure component. The valve seat assembly can be combined with the transport tube to provide a gas-tight transition between the valve seat assembly and the transport tube, and the first valve opening. At least the valve seat assembly and the closure component are formed as separate system components that can be modular, and the closure component the valve seat assembly can be modular so that the open position and the closed position for the closure component is driven by the drive unit.

Abstract: The invention relates to a gas inlet valve for the controlled inlet of a process gas into a vacuum process chamber, wherein the gas inlet valve comprises: a gas flow unit with a gas inlet, a gas outlet and an inner volume which has free access to the gas inlet and to the gas outlet, wherein the gas flow unit has a sealing surface in the inner volume, an adjusting device with an adjusting unit, wherein the adjusting unit projects into the inner volume and is adjustably mounted outside the gas flow unit in the adjusting device, wherein the adjusting unit has a plate which is arranged inside the inner volume, wherein the plate can be brought into a closed position by means of the adjusting device, in which the plate rests on the sealing surface and thus prevents a gas flow, and wherein the plate can be brought by means of the adjusting device into an open position in which the plate is spaced from the sealing surface and thus allows a gas flow, two flexible sealing elements, which are fixed in each case to the g

Abstract: An arrangement with a valve having a valve housing and a closure member mounted for movement in an interior space of the valve housing between a closed position and an open position by a valve drive. The closure member closes valve housing openings in the closed position and opens them in the open position. The arrangement has an attachment part with an attachment part housing and a push tube, and the push tube is mounted displaceably in the attachment part housing. The attachment part housing and the push tube together enclose a line cavity of the attachment part for conducting a fluid through the attachment part. The attachment part housing is fastened on the outside to the valve housing, and the push tube can be pushed through the interior space of the valve housing when the closure member is in the open position.

Abstract: A seal support ring (1) for a valve (2), particularly a vacuum valve, which has a throughflow opening (3) and a basic body (4), which annularly surrounds the throughflow opening, and a fastener arrangement (5) for fastening the seal support ring to a valve housing (6) of the valve. The basic body has a first side (7) on which the seal support ring, in a mounted state on the valve housing, lies against the valve housing, and the seal support ring has a seal ring (8) made from an elastomer which, in its position on the basic body, surrounds the throughflow opening. A casing wall (9) is arranged on the basic body and at least partially surrounds the throughflow opening and, on a second side (10) of the basic body (4) opposite the first side, protrudes from the basic body and has a larger inside diameter than the seal ring.

Abstract: The invention relates to a vacuum valve for the substantially gas-tight closure of an opening, comprising a closure element having a closure side and a coupling unit arranged on a rear side opposite the closure side, and a valve wall having valve seat surrounding the opening. The valve further comprises a linear drive unit enabling the closure element to be adjustable in at least two adjustment directions. The closure element is adjustable between an open position releasing the opening, an intermediate position pushed over the opening and a closed position closing the opening. The vacuum valve comprises a guide for the closure element associated with the opening. The closure element comprises a guide element interacting with the guide during an adjustment from the open position to the closed position and back.

Abstract: A directional valve having a valve housing having a primary port and at least one first and one second secondary port and a rotary piece arranged in the valve housing, which is penetrated by a channel and is rotatable about a rotation axis in order to adjust the directional valve between at least first and second switching positions. A first end of the channel is concentric to the axis. The rotary piece has an outer surface which is curved in a spherical cap-shaped manner, at which the second end of the channel opens. The valve housing has an inner surface which is curved in a spherical cap-shaped manner, at which inner surface secondary connection channels of the secondary connections open, and which is opposite the curve outer surface of the rotary piece. The curved outer surface of the rotary piece and the curved inner surface of the valve housing extend at most over the extent of a hemisphere.

Abstract: The invention relates to a vacuum valve (10) for the substantially gas-tight closure of an opening defining an opening axis, comprising a closure element (14) having a closure side and a coupling unit arranged on a rear side opposite the closure side, and a valve wall having valve seat (12a) surrounding the opening. The valve further comprises a linear drive unit by means of which the closure element (14) is adjustable in at least two adjustment directions substantially orthogonally to the opening axis along an adjustment axis and thus the closure element (14) is adjustable between an open position releasing the opening, an intermediate position pushed over the opening and a closed position closing the opening. The vacuum valve (10) comprises a guide for the closure element (14) associated with the opening.

Abstract: A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.

Abstract: A closure device (1) for an opening (2) in a chamber wall (3) is provided, wherein the closure device (1) has at least one closure element (4) and at least one closure element carrier body (5) and at least one yoke (6). The closure element (4) is fixedly connected to the yoke (6) by the closure element carrier body (5), wherein the yoke (6) is mounted in a housing (9) of the closure device (1) in such a way that the yoke can be slid by at least one cylinder-piston drive unit (7) of the closure device (1), in particular parallel to a longitudinal extent (8) of the closure element carrier body (5). The yoke (6) has at least one cylinder cavity (10) of the cylinder-piston drive unit (7) and/or at least one guide element receptacle (11) for guiding a guide element (12) of the closure device (1).

Abstract: Disclosed is a regulating vacuum having a first valve seat having a first valve opening defining a first opening axis and a first sealing surface surrounding the first valve opening, and a first valve disk having a first contact surface corresponding to the first sealing surface. The valve includes a drive unit coupled to the first valve disk to adjust at least between an open position to a closed position. The regulating vacuum valve has at least one second valve seat, having a second valve opening with a second sealing surface. In addition, a second valve disk having a second contact surface corresponding to the second sealing surface is provided. An overall valve opening of the regulating vacuum valve is formed by the first valve opening as a first valve partial opening and the second valve opening as a second valve partial opening.

Abstract: A safeguarding device, in particular a safeguarding device for a wafer transport container includes at least one positive-fit unit configured at least for a safeguarding of a wafer-transport-container opening element of a wafer transport container, which is held in its closure position by a closing mechanism.

Abstract: A positioning device, in particular a wafer transportation container positioning device, for positioning a wafer transportation container in a loading and/or unloading position of a loading and/or unloading station which is configured at least for loading and/or unloading wafers from the wafer transportation container. The positioning device, in particular the wafer transportation container positioning device, comprises a positioning mechanism which is configured for contactless positioning of the wafer transportation container in a coupling process between the wafer transportation container and the loading and/or unloading station.

Abstract: A vacuum valve is provided having a valve housing (1) which has a vacuum region (4) in the interior, a closure unit (5) which is arranged in the vacuum region (4) of the valve housing (1) and by which at least one valve opening (2, 3) is closable in a closed state of the vacuum valve, a longitudinal drive (11) by which the closure unit (5) is adjustable in a longitudinal direction (10) for adjusting the closure unit (5) between a position opening up the valve opening (2, 3) and a position covering the valve opening (2, 3). A longitudinal guide (19) for the displaceable guiding of the closure unit (5) parallel to the longitudinal direction (10) is provided, with this longitudinal guide having a guide rod (20) extending parallel to the longitudinal direction (10), and at least one guide part (21). At least one bearing element (36) of the guide part (21) is arranged in a region sealed off from the vacuum region (4) of the valve housing (1).

Abstract: Vacuum valve having a valve housing with first and second valve openings, and a closure unit having first and second plates, a roller support arranged between the plates, multiple roller pairs, each formed from first and second spreading rollers, and a spring. The plates are carried together with the roller support when it moves parallel to a movement direction from the open position into an intermediate position, and an additional movement of the plates in the movement direction is blocked when the roller support moves from the intermediate position into a closed position, during which the spreading rollers move along rising flanks of recesses, and the plates are thus spread apart. Rotational axes of the spreading rollers of each roller pair are offset relative to each other and are spaced apart in the spreading direction by a distance smaller than a sum of the radiuses of the spreading rollers.

Abstract: A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.

Abstract: A positioning device, in particular a wafer transportation container positioning device, for positioning a wafer transportation container in a loading and/or unloading position of a loading and/or unloading station which is configured at least for loading and/or unloading wafers from the wafer transportation container. The positioning device, in particular the wafer transportation container positioning device, comprises a positioning mechanism which is configured for contactless positioning of the wafer transportation container in a coupling process between the wafer transportation container and the loading and/or unloading station.

Abstract: A closure device (1) for an opening (2) in a chamber wall (3) is provided, wherein the closure device (1) has at least one closure element (4) and at least one closure element carrier body (5) and at least one yoke (6). The closure element (4) is fixedly connected to the yoke (6) by the closure element carrier body (5), wherein the yoke (6) is mounted in a housing (9) of the closure device (1) in such a way that the yoke can be slid by at least one cylinder-piston drive unit (7) of the closure device (1), in particular parallel to a longitudinal extent (8) of the closure element carrier body (5). The yoke (6) has at least one cylinder cavity (10) of the cylinder-piston drive unit (7) and/or at least one guide element receptacle (11) for guiding a guide element (12) of the closure device (1).