Abstract: A calibration standard comprises a supporting structure (1) of single crystal material with at least one pair of different kinds of structures consisting of a raised line (2) and a trench (3). These structures have the identical width in the range of about 500 nm. The single crystal material preferably is silicon with (110)-orientation.

Abstract: A calibration standard comprises a supporting structure (1) of single crystal material with at least one pair of different kinds of structures consisting of a raised line (2) and a trench (3). These structures have the identical width in the range of about 500 nm. The single crystal material preferably is silicon with (110)-orientation.

Abstract: A method for measuring the width of a tip in an Atomic Force Microscope/Scanning Tunneling Microscope using a calibration standard is provided. The method incorporates the steps of providing a tip, measuring the width b1 of a first kind of structure, and measuring the width b2 of a second kind of structure. The steps of measuring comprise the steps of profiling the first and second kinds of structures with a tip and calculating the width of the tip as a function of the measured widths b1 and b2. The calibration standard comprises the first and second kinds of structures and may be, for example, a trench and a raised line which have substantially the same width.

Abstract: A sensor (100) is set forth with which a microscope based on atomic forces is constructed and which represents the forces in up to three components. The sensor (100) is designed such that different vibration modes (transversal and torsional) can be induced individually and each mode corresponds to one force direction.

Abstract: A calibration standard comprises a supporting structure (1) of single crystal material with at least one pair of different kinds of structures consisting of a raised line (2) and a trench (3). These structures have the identical width in the range of about 500 nm. The single crystal material preferably is silicon with (110)-orientation.

Abstract: A scanning tunneling microscope is disclosed with the probe tip formed as an integral part of a membrane. A counter-electrode is formed on the membrane and four electrodes are provided spaced apart from the counter-electrode. The tip is scanned by means of these electrodes. Coarse positioning of the tip along the Z axis is done by applying pressure or vacuum to the membrane. Also disclosed is the method of making the scanning tunneling microscope.

Abstract: A differential fiber interferometer includes first and second optical fibers that pass through a coupler which has both input and output ends. A laser optically energizes a first one of the fibers and, via the coupler, the second fiber. A telescope lens system focuses optical beams from the first and second fibers onto an object and receives reflections therefrom for retrotransmission. The object is caused to oscillate at a first frequency so as to modulate the phase of the reflected optical beams. An optical sensor, positioned on the input side of the coupler, converts to electrical signals the reflected optical energy that appears on the second fiber. The reflected energy includes optical energies from both the first and second fibers. A first detector is responsive to the sensor's electrical outputs to produce a signal that is proportional to the differential phase between the reflected optical energies.