Patents by Inventor Martin R. Hannifan

Martin R. Hannifan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Transmissive system for characterizing materials containing photoreactive constituents
    Patent number: 5216487
    Abstract: A transmissive system for characterizing the photochemical reactivity and solubility properties of materials, such as photoresist, that contain one or more photo-active constituents and that can be formed as films on optically-transparent substrates. The system operates to detect the intensity of light transmitted through the photo-active material and the optically-transparent substrate. Generally speaking, the system comprises: a) an optically-transparent substrate means for providing a substrate for a film formed of a material that contains one or more photo-active constituents; b) exposure means for transmitting at least one selected wavelength of light through at least one selected area of the film; and c) detection means for detecting the intensity of light transmitted through the film and optically-transparent substrate means.
    Type: Grant
    Filed: May 22, 1991
    Date of Patent: June 1, 1993
    Assignee: Site Services, Inc.
    Inventors: David C. De Bruin, Martin R. Hannifan