Abstract: An electric motor system includes a battery, an inverter, an electric motor, a zero-phase switching arm and a control unit. The inverter converts DC power output from the battery into three-phase AC power and outputs the three-phase AC power to the electric motor. A rotor of the electric motor rotates by the three-phase AC power output from the inverter. A neural point of the electric motor is connected to the zero-phase switching arm. A zero-phase current flowing through respective windings of the electric motor is adjusted by switching of the zero-phase switching arm. By this means, in the electric motor system, torque is generated at the rotor also using the zero-phase current as well as a three-phase AC current flowing through the respective windings.

Abstract: A reactor for epitaxial growth wherein a susceptor on which semiconductor wafers are placed is heated by a heater, while rotating around a vertically provided gas feed pipe in a bell jar and a gas introduced through the gas feed pipe into the bell jar is decomposed to deposite a crystalline semiconductor material on the wafers, the susceptor having a plurality of pockets for positioning the wafers in which the pockets are arranged on the uniform temperature region of the susceptor other than the temperature-unstable peripheral portion thereof, thereby preventing production of defective products due to dislocation in crystal growth.