Abstract: A semiconductor device includes: a lower electrode; a first dielectric layer provided on the lower electrode; a first upper electrode provided on the first dielectric layer; a second dielectric layer provided on the first upper electrode; a second upper electrode provided on the second dielectric layer and electrically connected to the lower electrode; a third dielectric layer provided on the second upper electrode; and a third upper electrode provided on the third dielectric layer and electrically connected to the first upper electrode, wherein a first capacitor between the lower electrode and the first upper electrode, a second capacitor between the first upper electrode and the second upper electrode, and a third capacitor between the second upper electrode and the third upper electrode are connected in parallel with each other.

Abstract: A semiconductor device includes: a semiconductor base body; a first region of a first conductivity type selectively provided in an upper part of the semiconductor base body; a second region of a second conductivity type provided in contact with the first region in the upper part of the semiconductor base body; a third region of the second conductivity type provided away from the second region in the upper part of the semiconductor base body; a fourth region of the second conductivity type provided between the second region and the third region in the upper part of the semiconductor base body; a first isolation region provided between the second region and the fourth region; and a second isolation region provided between the third region and the fourth region.

Abstract: A semiconductor device includes: an n+-type drain region deposited at an upper part of a p-type semiconductor base body; an n-type drift region deposited to be in contact with the n+-type drain region; an n+-type source region opposed to the n+-type drain region with the n-type drift region interposed; a p-type gate region deposited to be in contact with the n-type drift region; an interlayer insulating film covering the n-type drift region; a resistive element having a spiral-like planar shape provided inside the interlayer insulating film; a drain electrode wire connected to the n+-type drain region and one end of the resistive element; a source electrode wire connected to the n+-type source region; a gate electrode wire connected to the p-type gate region; and a potential-dividing terminal wire connected to the resistive element, wherein a gap between the source electrode wire and an outermost circumference of the resistive element is constant.

Abstract: A semiconductor integrated circuit includes a high-potential-side circuit region, a high-voltage junction termination structure surrounding the high-potential-side circuit region, and a low-potential-side circuit region surrounding the high-potential-side circuit region via the high-voltage junction termination structure which are integrated into a single chip, and wherein a first distance between a looped well region and a buried layer in a region in which a first contact region is formed is smaller than a second distance between the looped well region and the buried layer in a region in which a carrier reception region is formed.

Abstract: An HVIC is a gate driver IC that drives a three-phase inverter and includes high-potential-side regions for three phases on a single semiconductor substrate. The high-potential-side region includes an n-type region and has a potential that is fixed at a power source voltage potential through a VB contact region in the n-type region. The high-potential-side region has a high-side driving circuit that drives an upper arm element of the inverter. An interphase region between adjacent high-potential-side regions has no GND contact region and no GND contact electrode arranged therein, and has only a p-type region at a ground potential constituting a low-potential-side region. The high-potential-side region of one phase has a p?-type opening between the high-side driving circuit of thereof and the high-side driving circuit or the GND contact region of an adjacent high-potential-side region that is of another phase and sandwiches the interphase region therebetween.

Abstract: A semiconductor device includes: a well region of a second conductivity-type deposited on a surface layer of a semiconductor layer of a first conductivity-type; a breakdown voltage region of the second conductivity-type arranged to surround the well region and having a lower impurity concentration than the well region; a base region of the first conductivity-type arranged to surround the breakdown voltage region; a carrier supply region of the second conductivity-type arranged on a surface layer of the base region and serving as a level shifter; and a carrier reception region of the level shifter, wherein the carrier reception region is formed of a first universal contact region including a region of the first conductivity-type and a region of the second conductivity-type arranged in contact with each other.

Abstract: A method of manufacturing a semiconductor integrated circuit includes a first ion implantation process implanting impurity ions of a second conductivity type into a bottom surface of a semiconductor substrate by adjusting an acceleration voltage and a projection range for forming a first current suppression layer, and a second ion implantation process implanting impurity ions of a first conductivity type into the bottom surface of the semiconductor substrate by adjusting an acceleration voltage and a projection range for forming a second current suppression layer. The semiconductor integrated circuit includes a first well region of the first conductivity type and a second well region of the second conductivity type provided in an upper portion of the first well region. The first current suppression layer is separated from the first well region and the second current suppression layer is provided under the first current suppression layer.

Abstract: A semiconductor device includes: a wiring layer; a titanium nitride layer deposited on the wiring layer; a titanium oxynitride layer deposited on the titanium nitride layer; a titanium oxide layer deposited on the titanium oxynitride layer; and a surface passivation film deposited on the titanium oxide layer, wherein an opening penetrating the titanium nitride layer, the titanium oxynitride layer, the titanium oxide layer, and the surface passivation film is provided to expose a part of the wiring layer so as to serve as a pad.

Abstract: Provided is a resistance element, including: a semiconductor substrate; a first insulating film stacked on the semiconductor substrate; a resistance layer selectively stacked on the first insulating film; a first auxiliary film separated from the resistance layer; a second auxiliary film separated from the resistance layer in a direction different from that of the first auxiliary film; a second insulating film stacked on the first insulating film to cover the resistance layer, and the first auxiliary film and the second auxiliary film; a first electrode connected to the resistance layer and stacked on the second insulating film disposed on an upper side of the first auxiliary film; and a second electrode connected to the resistance layer by being separated from the first electrode and stacked on the second insulating film on the upper side of the second auxiliary film.

Abstract: A semiconductor integrated circuit includes: a semiconductor base body of a first conductivity type; a first well region of a second conductivity type, deposited at an upper portion of the semiconductor base body, to which a first potential is applied; a second well region of the first conductivity type, deposited at an upper portion of the first well region, to which a second potential lower than the first potential is applied; a main electrode region to which the second potential is applied, the main electrode region being deposited at the upper portion of the first well region and away from the second well region; a first buried layer of the second conductivity type buried locally under the second well region; and a second buried layer of the second conductivity type buried locally under the main electrode region and away from the first buried layer.

Abstract: In a level shifter circuit that transmits a set signal and a reset signal input to input terminals of a high-side latch circuit, the source sides of high voltage transistors are connected to current negative feedback resistors, and transistors are connected in parallel to the current negative feedback resistors. Further included is a high-side voltage detection circuit that detects whether the voltage of a high-side power supply terminal is a high voltage. When a high voltage is detected, the transistors are turned OFF to make the drain currents that flow smaller, thereby making it possible to improve the trade-off between heat generation and propagation delay characteristics in the high voltage transistors.

Abstract: A method of manufacturing a semiconductor integrated circuit includes a first ion implantation process implanting impurity ions of a second conductivity type into a bottom surface of a semiconductor substrate by adjusting an acceleration voltage and a projection range for forming a first current suppression layer, and a second ion implantation process implanting impurity ions of a first conductivity type into the bottom surface of the semiconductor substrate by adjusting an acceleration voltage and a projection range for forming a second current suppression layer. The semiconductor integrated circuit includes a first well region of the first conductivity type and a second well region of the second conductivity type provided in an upper portion of the first well region. The first current suppression layer is separated from the first well region and the second current suppression layer is provided under the first current suppression layer.

Abstract: A semiconductor integrated circuit includes: a first well region of a first conductivity type; a second well region of a second conductivity type provided in an upper portion of the first well region; a first current suppression layer of a second conductivity type being provided to be separated from the first well region in a lower portion of a base-body of the second conductivity type directly under the first well region and having an impurity concentration higher than that of the base-body; and a second current suppression layer of the first conductivity type provided under the first current suppression layer so as to be exposed from a bottom surface of the base-body.

Abstract: A semiconductor integrated circuit includes a high-potential-side circuit region, a high-voltage junction termination structure surrounding the high-potential-side circuit region, and a low-potential-side circuit region surrounding the high-potential-side circuit region via the high-voltage junction termination structure which are integrated into a single chip, and wherein a first distance between a looped well region and a buried layer in a region in which a first contact region is formed is smaller than a second distance between the looped well region and the buried layer in a region in which a carrier reception region is formed.

Abstract: A resistive element includes: a semiconductor substrate; a first insulating film deposited on the semiconductor substrate; a resistive layer deposited on the first insulating film; a second insulating film deposited to cover the first insulating film and the resistive layer; a first electrode deposited on the second insulating film and electrically connected to the resistive layer; a relay wire deposited on the second insulating film without being in contact with the first electrode, and including a resistive-layer connection terminal electrically connected to the resistive layer and a substrate connection terminal connected to the semiconductor substrate with an ohmic contact; and a second electrode deposited on a bottom side of the semiconductor substrate, wherein a resistor is provided between the first electrode and the second electrode.

Abstract: A semiconductor integrated circuit includes: a semiconductor base body of a first conductivity type; a first well region of a second conductivity type, deposited at an upper portion of the semiconductor base body, to which a first potential is applied; a second well region of the first conductivity type, deposited at an upper portion of the first well region, to which a second potential lower than the first potential is applied; a main electrode region to which the second potential is applied, the main electrode region being deposited at the upper portion of the first well region and away from the second well region; a first buried layer of the second conductivity type buried locally under the second well region; and a second buried layer of the second conductivity type buried locally under the main electrode region and away from the first buried layer.

Abstract: A p?-type isolation region is provided at a part between a p-type ground region and a circuit region (a high potential region and an intermediate potential region) in an n-type well region. The p?-type isolation region is electrically connected with a H-VDD pad and an n+-type drain region of a HVNMOS. The p?-type isolation region has between n+-type pickup connect regions and between n+-type drain regions of two of the HVNMOSs, a protruding part (a T-shaped part, an L-shaped part, a partial U-shaped part) or an additional part that protrudes toward a p-ground region.

Abstract: Warping of a semiconductor wafer occurring due to a difference in the thermal expansion rates of an insulating film and the semiconductor wafer is restricted. Therefore, processing failures and conveying failures in the manufacturing process, as well as cracking of the semiconductor wafer, are restricted. Provided is a high breakdown voltage passive element including a substrate, a lower metal layer and upper metal layer stacked on the substrate, and an insulating unit formed between the lower metal layer and upper metal layer, wherein the insulating unit has a first insulating film whose thermal expansion rate is lower than the thermal expansion rate of the substrate, and a second insulating film, formed on the first insulating film, whose thermal expansion rate is higher than the thermal expansion rate of the substrate.

Abstract: An interlayer insulating film is disposed on a LOCOS oxide film covering an n-type drift region of a JFET. A polysilicon resistor having a spiral planar shape is disposed in the interlayer insulating film. A spiral wire in an outermost circumference of the polysilicon resistor is covered by a source electrode wire that extends on the interlayer insulating film. An end of the polysilicon resistor is electrically connected to a drain electrode wire. A ground terminal wire and a voltage division terminal wire are electrically connected to a spiral wire farther on an inner circumference side by one or more wires than the spiral wire. A portion farther on an inner circumference side than the spiral wire is used as a resistive element, and voltage for an input pad of the JFET is thereby divided to be taken out as a potential of the voltage division terminal wire.

Abstract: Provided is a resistance element, including: a semiconductor substrate; a first insulating film stacked on the semiconductor substrate; a resistance layer selectively stacked on the first insulating film; a first auxiliary film separated from the resistance layer; a second auxiliary film separated from the resistance layer in a direction different from that of the first auxiliary film; a second insulating film stacked on the first insulating film to cover the resistance layer, and the first auxiliary film and the second auxiliary film; a first electrode connected to the resistance layer and stacked on the second insulating film disposed on an upper side of the first auxiliary film; and a second electrode connected to the resistance layer by being separated from the first electrode and stacked on the second insulating film on the upper side of the second auxiliary film.