Patents by Inventor Masahi Shimoyama

Masahi Shimoyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plating method
    Patent number: 10468364
    Abstract: A plating method which can achieve a desired dome height is disclosed. The method includes: preparing correlation data showing a relationship between proportion of dome height to bump height and concentration of chloride ions; producing a plating solution containing chloride ions at a concentration which has been selected based on a desired proportion of dome height to bump height and on the correlation data, the selected concentration being in a range of 100 mg/dm3 to 300 mg/dm3; immersing a substrate in the plating solution; and passing an electric current between an anode and the substrate, both immersed in the plating solution, thereby plating the substrate to form bumps.
    Type: Grant
    Filed: March 22, 2017
    Date of Patent: November 5, 2019
    Assignee: EBARA CORPORATION
    Inventors: Yohei Wakuda, Yasuyuki Masuda, Masahi Shimoyama