Abstract: A data processor has a ROM that holds a boot program for causing the CPU to transfer a debug program from a serial interface circuit to a debug-use RAM area. When supplied externally with an SDI boot command, the serial interface circuit outputs an SDI interrupt request signal (SDI_boot) to an interrupt controller. The signal causes the CPU to execute the boot program. Debug operations are varied as per the contents of the downloaded debug program, and data exchanges upon debugging are carried out serially.

Abstract: A film patterning method using resist as a mask, comprises the steps of forming a film 2 on a substrate 1, coating resist 3 on the film 2, exposing the resist 3, developing the resist 3 by a liquid phase developing solution 4, removing the liquid developing solution 4 from a surface of the film 2, irradiating ultraviolet rays onto the resist 3, which remains on the film 2 by the developing step, in an oxygen containing atmosphere, removing developed residue of the surface of the resist 3 by supplying an alkali aqueous solution 5 to the resist 3 which has remained on the film 2, and forming patterns of the film 2 by etching the film 2 exposed from the resist 3. Accordingly, the unnecessary residue of resist can be removed from the substrate in a short time after the development.

Abstract: A data processor has a ROM that holds a boot program for causing the CPU to transfer a debug program from a serial interface circuit to a debug-use RAM area. When supplied externally with an SDI boot command, the serial interface circuit outputs an SDI interrupt request signal (SDI.sub.-- boot) to an interrupt controller. The signal causes the CPU to execute the boot program. Debug operations are varied as per the contents of the downloaded debug program, and data exchanges upon debugging are carried out serially.