Abstract: A method and apparatus (11) for irradiating an electron beam, wherein a triangular wave generator (22) provides a triangular wave current to a scanning coil (17) to move the electron beam in a first scanning direction (Y), while a square wave generator (21) provides a square wave current to a deflecting coil (16) to move the electron beam in a second scanning direction (X) orthogonal to the first scanning direction (Y). The triangular wave current provided from the triangular wave generator is modulated to cancel the effects of hysteresis in the scanning coil. Further, the rise of the square wave current is synchronized and shifted a prescribed interval in relation to the peak values of the triangular wave current in order to distribute the reversing points on the electron beam path along the second scanning direction.

Abstract: A method and apparatus (11) for irradiating an electron beam, wherein a triangular wave generator (22) provides a triangular wave current to a scanning coil (17) to move the electron beam in a first scanning direction (Y), while a square wave generator (21) provides a square wave current to a deflecting coil (16) to move the electron beam in a second scanning direction (X) orthogonal to the first scanning direction (Y). The triangular wave current provided from the triangular wave generator is modulated to cancel the effects of hysteresis in the scanning coil. Further, the rise of the square wave current is synchronized and shifted a prescribed interval in relation to the peak values of the triangular wave current in order to distribute the reversing points on the electron beam path along the second scanning direction.

Abstract: An electron beam irradiation apparatus has an electron accelerator for accelerating electrons emitted from an electron beam source to irradiate a target, and a power supply for supplying power of direct current having a high voltage to the electron accelerator. The power supply comprises an inverter device for transforming a commercial AC power output into an AC power output of a variable voltage, a DC power supply for stepping up a voltage of the AC power output of the inverter device, rectifying the stepped up voltage to a high DC voltage, and applying the high DC voltage to the electron accelerator, and a feedback control circuit for controlling the power output of the inverter device by detecting the high DC voltage and a current.