Patents by Inventor Masahisa OKUNO

Masahisa OKUNO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    Publication number: 20110233198
    Abstract: A substrate processing apparatus and a substrate processing method capable of supplying uniform electromagnetic wave power and performing uniform heating are provided. The substrate processing apparatus includes a process chamber for processing a wafer, a boat installed in the process chamber to hold the wafer, a gas introduction part installed below the wafer held by the boat for introducing a gas toward a back surface of the wafer, and a waveguide port installed over the wafer held by the boat for introducing an electromagnetic wave.
    Type: Application
    Filed: March 21, 2011
    Publication date: September 29, 2011
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Masahisa OKUNO, Atsushi UMEKAWA